JPS5718337A - Vacuum collet - Google Patents

Vacuum collet

Info

Publication number
JPS5718337A
JPS5718337A JP9368180A JP9368180A JPS5718337A JP S5718337 A JPS5718337 A JP S5718337A JP 9368180 A JP9368180 A JP 9368180A JP 9368180 A JP9368180 A JP 9368180A JP S5718337 A JPS5718337 A JP S5718337A
Authority
JP
Japan
Prior art keywords
semiconductor
vacuum collet
drawn
vacuum
surface area
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9368180A
Other languages
English (en)
Inventor
Toshihiko Ishii
Masaji Otsuka
Katsuya Ota
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Sanyo Electric Co Ltd
Sanyo Electric Co Ltd
Original Assignee
Tokyo Sanyo Electric Co Ltd
Tottori Sanyo Electric Co Ltd
Sanyo Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Sanyo Electric Co Ltd, Tottori Sanyo Electric Co Ltd, Sanyo Electric Co Ltd filed Critical Tokyo Sanyo Electric Co Ltd
Priority to JP9368180A priority Critical patent/JPS5718337A/ja
Publication of JPS5718337A publication Critical patent/JPS5718337A/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
JP9368180A 1980-07-08 1980-07-08 Vacuum collet Pending JPS5718337A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9368180A JPS5718337A (en) 1980-07-08 1980-07-08 Vacuum collet

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9368180A JPS5718337A (en) 1980-07-08 1980-07-08 Vacuum collet

Publications (1)

Publication Number Publication Date
JPS5718337A true JPS5718337A (en) 1982-01-30

Family

ID=14089139

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9368180A Pending JPS5718337A (en) 1980-07-08 1980-07-08 Vacuum collet

Country Status (1)

Country Link
JP (1) JPS5718337A (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03111432U (ja) * 1990-02-28 1991-11-14
US5348316A (en) * 1992-07-16 1994-09-20 National Semiconductor Corporation Die collet with cavity wall recess

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03111432U (ja) * 1990-02-28 1991-11-14
US5348316A (en) * 1992-07-16 1994-09-20 National Semiconductor Corporation Die collet with cavity wall recess
US5415331A (en) * 1992-07-16 1995-05-16 National Semiconductor Corporation Method of placing a semiconductor with die collet having cavity wall recess

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