JPS57177526A - Part processing device - Google Patents

Part processing device

Info

Publication number
JPS57177526A
JPS57177526A JP6131081A JP6131081A JPS57177526A JP S57177526 A JPS57177526 A JP S57177526A JP 6131081 A JP6131081 A JP 6131081A JP 6131081 A JP6131081 A JP 6131081A JP S57177526 A JPS57177526 A JP S57177526A
Authority
JP
Japan
Prior art keywords
fluid
reservoir
processing
hole
processing fluid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6131081A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6362091B2 (enExample
Inventor
Keiichi Shibusaku
Nobuo Monma
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP6131081A priority Critical patent/JPS57177526A/ja
Publication of JPS57177526A publication Critical patent/JPS57177526A/ja
Publication of JPS6362091B2 publication Critical patent/JPS6362091B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/6715—Apparatus for applying a liquid, a resin, an ink or the like

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Cleaning By Liquid Or Steam (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
JP6131081A 1981-04-24 1981-04-24 Part processing device Granted JPS57177526A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6131081A JPS57177526A (en) 1981-04-24 1981-04-24 Part processing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6131081A JPS57177526A (en) 1981-04-24 1981-04-24 Part processing device

Publications (2)

Publication Number Publication Date
JPS57177526A true JPS57177526A (en) 1982-11-01
JPS6362091B2 JPS6362091B2 (enExample) 1988-12-01

Family

ID=13167461

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6131081A Granted JPS57177526A (en) 1981-04-24 1981-04-24 Part processing device

Country Status (1)

Country Link
JP (1) JPS57177526A (enExample)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4877663A (enExample) * 1972-01-20 1973-10-18
JPS51129066U (enExample) * 1975-03-03 1976-10-18
JPS54160174A (en) * 1978-06-09 1979-12-18 Hitachi Ltd Washing device for electronic parts

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4877663A (enExample) * 1972-01-20 1973-10-18
JPS51129066U (enExample) * 1975-03-03 1976-10-18
JPS54160174A (en) * 1978-06-09 1979-12-18 Hitachi Ltd Washing device for electronic parts

Also Published As

Publication number Publication date
JPS6362091B2 (enExample) 1988-12-01

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