FR2601968B1 - Bains decapants et procede pour eliminer un revetement comprenant du niobium sur un substrat. - Google Patents

Bains decapants et procede pour eliminer un revetement comprenant du niobium sur un substrat.

Info

Publication number
FR2601968B1
FR2601968B1 FR8611001A FR8611001A FR2601968B1 FR 2601968 B1 FR2601968 B1 FR 2601968B1 FR 8611001 A FR8611001 A FR 8611001A FR 8611001 A FR8611001 A FR 8611001A FR 2601968 B1 FR2601968 B1 FR 2601968B1
Authority
FR
France
Prior art keywords
coating
substrate
niobium
stripping baths
baths
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR8611001A
Other languages
English (en)
Other versions
FR2601968A1 (fr
Inventor
Gerard Parissis
Lucien Clerbois
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Solvay Chimie SA
Original Assignee
Interox SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Interox SA filed Critical Interox SA
Priority to FR8611001A priority Critical patent/FR2601968B1/fr
Priority to BR8605611A priority patent/BR8605611A/pt
Priority to EP87201347A priority patent/EP0257671B1/fr
Priority to DE8787201347T priority patent/DE3778246D1/de
Priority to AT87201347T priority patent/ATE74971T1/de
Priority to JP62185328A priority patent/JPS6335787A/ja
Publication of FR2601968A1 publication Critical patent/FR2601968A1/fr
Application granted granted Critical
Publication of FR2601968B1 publication Critical patent/FR2601968B1/fr
Priority to US07/396,754 priority patent/US4950359A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00—Etching metallic material by chemical means
    • C23F1/44—Compositions for etching metallic material from a metallic material substrate of different composition
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00—Etching metallic material by chemical means
    • C23F1/10—Etching compositions
    • C23F1/14—Aqueous compositions
    • C23F1/32—Alkaline compositions
    • C23F1/38—Alkaline compositions for etching refractory metals

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
  • ing And Chemical Polishing (AREA)
  • Paints Or Removers (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Materials For Medical Uses (AREA)
  • Chemically Coating (AREA)
FR8611001A 1986-07-25 1986-07-25 Bains decapants et procede pour eliminer un revetement comprenant du niobium sur un substrat. Expired FR2601968B1 (fr)

Priority Applications (7)

Application Number Priority Date Filing Date Title
FR8611001A FR2601968B1 (fr) 1986-07-25 1986-07-25 Bains decapants et procede pour eliminer un revetement comprenant du niobium sur un substrat.
BR8605611A BR8605611A (pt) 1986-07-25 1986-11-13 Banhos decapantes e processo para eliminar um revestimento que contem niobio sobre um substrato
EP87201347A EP0257671B1 (fr) 1986-07-25 1987-07-14 Procédé pour éliminer un revêtement comprenant du niobium sur un substrat
DE8787201347T DE3778246D1 (de) 1986-07-25 1987-07-14 Verfahren zum entfernen einer niob enthaltenden beschichtung von einem substrat.
AT87201347T ATE74971T1 (de) 1986-07-25 1987-07-14 Verfahren zum entfernen einer niob enthaltenden beschichtung von einem substrat.
JP62185328A JPS6335787A (ja) 1986-07-25 1987-07-24 基体上のニオブ含有被覆の除去用洗浄浴および前記被覆の除去方法
US07/396,754 US4950359A (en) 1986-07-25 1989-08-17 Process for removing a coating containing niobium from a substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8611001A FR2601968B1 (fr) 1986-07-25 1986-07-25 Bains decapants et procede pour eliminer un revetement comprenant du niobium sur un substrat.

Publications (2)

Publication Number Publication Date
FR2601968A1 FR2601968A1 (fr) 1988-01-29
FR2601968B1 true FR2601968B1 (fr) 1989-04-14

Family

ID=9337854

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8611001A Expired FR2601968B1 (fr) 1986-07-25 1986-07-25 Bains decapants et procede pour eliminer un revetement comprenant du niobium sur un substrat.

Country Status (7)

Country Link
US (1) US4950359A (fr)
EP (1) EP0257671B1 (fr)
JP (1) JPS6335787A (fr)
AT (1) ATE74971T1 (fr)
BR (1) BR8605611A (fr)
DE (1) DE3778246D1 (fr)
FR (1) FR2601968B1 (fr)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5269850A (en) * 1989-12-20 1993-12-14 Hughes Aircraft Company Method of removing organic flux using peroxide composition
WO1992007110A1 (fr) * 1990-10-19 1992-04-30 Union Carbide Coatings Service Technology Corporation Bain de decapage et procede servant a decaper des composes de titane sur des metaux de base
US5232619A (en) * 1990-10-19 1993-08-03 Praxair S.T. Technology, Inc. Stripping solution for stripping compounds of titanium from base metals
US5201997A (en) * 1991-12-31 1993-04-13 United Technologies Corporation Chemical milling of niobium
US6074961A (en) * 1998-06-18 2000-06-13 Taiwan Semiconductor Manufacturing Company Caro's cleaning of SOG control wafer residue
US20110017608A1 (en) * 2009-07-27 2011-01-27 Faraday Technology, Inc. Electrochemical etching and polishing of conductive substrates
US8836120B2 (en) 2011-04-19 2014-09-16 Infineon Technologies Ag Semiconductor device with a layer including niobium, and/or tantalum overlying a contact pad or a metal layer
CN105018934A (zh) * 2015-07-15 2015-11-04 安徽多晶涂层科技有限公司 一种硬质涂层用退涂粉、配置的退涂液及退涂方法
JP7297623B2 (ja) * 2019-09-24 2023-06-26 株式会社東芝 線材の処理方法

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1999807A (en) * 1934-06-25 1935-04-30 Harold L Gibbs Extraction of values from ores
US3394063A (en) * 1965-10-22 1968-07-23 Matthew C. Blume Electrolytic stripping of copper, zinc and tin based coatings from a ferrous base using an alkaline pyrophosphate electrolyte
US3492210A (en) * 1967-10-16 1970-01-27 Hamilton Cosco Inc Electrolytic stripping of nonferrous metals from a ferrous metal base
JPS4829638A (fr) * 1971-08-20 1973-04-19
US3802973A (en) * 1972-08-09 1974-04-09 Pennwalt Corp Aluminum etching process
DE2239425C3 (de) * 1972-08-10 1978-04-20 Siemens Ag, 1000 Berlin Und 8000 Muenchen Verfahren zur elektrolytischen Behandlung von Nioboberflächen für Wechselstromanwendungen
US4304762A (en) * 1978-09-27 1981-12-08 Lever Brothers Company Stabilization of hydrogen peroxide
US4497725A (en) * 1980-04-01 1985-02-05 Interox Chemicals Ltd. Aqueous bleach compositions
US4495158A (en) * 1984-02-29 1985-01-22 Gte Products Corporation Process for the recovery of tantalum values

Also Published As

Publication number Publication date
DE3778246D1 (de) 1992-05-21
JPS6335787A (ja) 1988-02-16
US4950359A (en) 1990-08-21
EP0257671A1 (fr) 1988-03-02
FR2601968A1 (fr) 1988-01-29
BR8605611A (pt) 1988-03-29
ATE74971T1 (de) 1992-05-15
EP0257671B1 (fr) 1992-04-15

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Legal Events

Date Code Title Description
TP Transmission of property
ST Notification of lapse