DE3778246D1 - Verfahren zum entfernen einer niob enthaltenden beschichtung von einem substrat. - Google Patents
Verfahren zum entfernen einer niob enthaltenden beschichtung von einem substrat.Info
- Publication number
- DE3778246D1 DE3778246D1 DE8787201347T DE3778246T DE3778246D1 DE 3778246 D1 DE3778246 D1 DE 3778246D1 DE 8787201347 T DE8787201347 T DE 8787201347T DE 3778246 T DE3778246 T DE 3778246T DE 3778246 D1 DE3778246 D1 DE 3778246D1
- Authority
- DE
- Germany
- Prior art keywords
- substrate
- niob
- containing coating
- coating
- dissolution
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F1/00—Etching metallic material by chemical means
- C23F1/44—Compositions for etching metallic material from a metallic material substrate of different composition
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F1/00—Etching metallic material by chemical means
- C23F1/10—Etching compositions
- C23F1/14—Aqueous compositions
- C23F1/32—Alkaline compositions
- C23F1/38—Alkaline compositions for etching refractory metals
Landscapes
- Chemical & Material Sciences (AREA)
- Metallurgy (AREA)
- General Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Organic Chemistry (AREA)
- Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
- ing And Chemical Polishing (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Materials For Medical Uses (AREA)
- Chemically Coating (AREA)
- Paints Or Removers (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR8611001A FR2601968B1 (fr) | 1986-07-25 | 1986-07-25 | Bains decapants et procede pour eliminer un revetement comprenant du niobium sur un substrat. |
Publications (1)
Publication Number | Publication Date |
---|---|
DE3778246D1 true DE3778246D1 (de) | 1992-05-21 |
Family
ID=9337854
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE8787201347T Expired - Fee Related DE3778246D1 (de) | 1986-07-25 | 1987-07-14 | Verfahren zum entfernen einer niob enthaltenden beschichtung von einem substrat. |
Country Status (7)
Country | Link |
---|---|
US (1) | US4950359A (de) |
EP (1) | EP0257671B1 (de) |
JP (1) | JPS6335787A (de) |
AT (1) | ATE74971T1 (de) |
BR (1) | BR8605611A (de) |
DE (1) | DE3778246D1 (de) |
FR (1) | FR2601968B1 (de) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5269850A (en) * | 1989-12-20 | 1993-12-14 | Hughes Aircraft Company | Method of removing organic flux using peroxide composition |
CA2071944C (en) * | 1990-10-19 | 1998-02-03 | Jiinjen Albert Sue | Stripping solution and process for stripping compounds of titanium from base metals |
US5232619A (en) * | 1990-10-19 | 1993-08-03 | Praxair S.T. Technology, Inc. | Stripping solution for stripping compounds of titanium from base metals |
US5201997A (en) * | 1991-12-31 | 1993-04-13 | United Technologies Corporation | Chemical milling of niobium |
US6074961A (en) * | 1998-06-18 | 2000-06-13 | Taiwan Semiconductor Manufacturing Company | Caro's cleaning of SOG control wafer residue |
US20110017608A1 (en) * | 2009-07-27 | 2011-01-27 | Faraday Technology, Inc. | Electrochemical etching and polishing of conductive substrates |
US8836120B2 (en) | 2011-04-19 | 2014-09-16 | Infineon Technologies Ag | Semiconductor device with a layer including niobium, and/or tantalum overlying a contact pad or a metal layer |
CN105018934A (zh) * | 2015-07-15 | 2015-11-04 | 安徽多晶涂层科技有限公司 | 一种硬质涂层用退涂粉、配置的退涂液及退涂方法 |
JP7297623B2 (ja) * | 2019-09-24 | 2023-06-26 | 株式会社東芝 | 線材の処理方法 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US1999807A (en) * | 1934-06-25 | 1935-04-30 | Harold L Gibbs | Extraction of values from ores |
US3394063A (en) * | 1965-10-22 | 1968-07-23 | Matthew C. Blume | Electrolytic stripping of copper, zinc and tin based coatings from a ferrous base using an alkaline pyrophosphate electrolyte |
US3492210A (en) * | 1967-10-16 | 1970-01-27 | Hamilton Cosco Inc | Electrolytic stripping of nonferrous metals from a ferrous metal base |
JPS4829638A (de) * | 1971-08-20 | 1973-04-19 | ||
US3802973A (en) * | 1972-08-09 | 1974-04-09 | Pennwalt Corp | Aluminum etching process |
DE2239425C3 (de) * | 1972-08-10 | 1978-04-20 | Siemens Ag, 1000 Berlin Und 8000 Muenchen | Verfahren zur elektrolytischen Behandlung von Nioboberflächen für Wechselstromanwendungen |
US4304762A (en) * | 1978-09-27 | 1981-12-08 | Lever Brothers Company | Stabilization of hydrogen peroxide |
US4497725A (en) * | 1980-04-01 | 1985-02-05 | Interox Chemicals Ltd. | Aqueous bleach compositions |
US4495158A (en) * | 1984-02-29 | 1985-01-22 | Gte Products Corporation | Process for the recovery of tantalum values |
-
1986
- 1986-07-25 FR FR8611001A patent/FR2601968B1/fr not_active Expired
- 1986-11-13 BR BR8605611A patent/BR8605611A/pt unknown
-
1987
- 1987-07-14 AT AT87201347T patent/ATE74971T1/de not_active IP Right Cessation
- 1987-07-14 DE DE8787201347T patent/DE3778246D1/de not_active Expired - Fee Related
- 1987-07-14 EP EP87201347A patent/EP0257671B1/de not_active Expired - Lifetime
- 1987-07-24 JP JP62185328A patent/JPS6335787A/ja active Pending
-
1989
- 1989-08-17 US US07/396,754 patent/US4950359A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP0257671A1 (de) | 1988-03-02 |
ATE74971T1 (de) | 1992-05-15 |
US4950359A (en) | 1990-08-21 |
EP0257671B1 (de) | 1992-04-15 |
FR2601968B1 (fr) | 1989-04-14 |
JPS6335787A (ja) | 1988-02-16 |
FR2601968A1 (fr) | 1988-01-29 |
BR8605611A (pt) | 1988-03-29 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |