JPS57176719A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS57176719A
JPS57176719A JP56061709A JP6170981A JPS57176719A JP S57176719 A JPS57176719 A JP S57176719A JP 56061709 A JP56061709 A JP 56061709A JP 6170981 A JP6170981 A JP 6170981A JP S57176719 A JPS57176719 A JP S57176719A
Authority
JP
Japan
Prior art keywords
layer
insulating film
polysilicon
polysilicon layer
prevented
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56061709A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6364892B2 (enExample
Inventor
Seiichiro Kawamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP56061709A priority Critical patent/JPS57176719A/ja
Publication of JPS57176719A publication Critical patent/JPS57176719A/ja
Publication of JPS6364892B2 publication Critical patent/JPS6364892B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P34/00—Irradiation with electromagnetic or particle radiation of wafers, substrates or parts of devices

Landscapes

  • Recrystallisation Techniques (AREA)
JP56061709A 1981-04-23 1981-04-23 Manufacture of semiconductor device Granted JPS57176719A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56061709A JPS57176719A (en) 1981-04-23 1981-04-23 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56061709A JPS57176719A (en) 1981-04-23 1981-04-23 Manufacture of semiconductor device

Publications (2)

Publication Number Publication Date
JPS57176719A true JPS57176719A (en) 1982-10-30
JPS6364892B2 JPS6364892B2 (enExample) 1988-12-14

Family

ID=13179023

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56061709A Granted JPS57176719A (en) 1981-04-23 1981-04-23 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS57176719A (enExample)

Also Published As

Publication number Publication date
JPS6364892B2 (enExample) 1988-12-14

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