JPS57173972A - Manufacture of semiconductor ic device - Google Patents

Manufacture of semiconductor ic device

Info

Publication number
JPS57173972A
JPS57173972A JP56058438A JP5843881A JPS57173972A JP S57173972 A JPS57173972 A JP S57173972A JP 56058438 A JP56058438 A JP 56058438A JP 5843881 A JP5843881 A JP 5843881A JP S57173972 A JPS57173972 A JP S57173972A
Authority
JP
Japan
Prior art keywords
policrystalline
region
layer
main base
regions
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56058438A
Other languages
English (en)
Japanese (ja)
Other versions
JPS644351B2 (enrdf_load_stackoverflow
Inventor
Akira Kawakatsu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oki Electric Industry Co Ltd
Original Assignee
Oki Electric Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oki Electric Industry Co Ltd filed Critical Oki Electric Industry Co Ltd
Priority to JP56058438A priority Critical patent/JPS57173972A/ja
Publication of JPS57173972A publication Critical patent/JPS57173972A/ja
Publication of JPS644351B2 publication Critical patent/JPS644351B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D48/00—Individual devices not covered by groups H10D1/00 - H10D44/00
    • H10D48/30—Devices controlled by electric currents or voltages
    • H10D48/32—Devices controlled by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H10D48/34—Bipolar devices
    • H10D48/345—Bipolar transistors having ohmic electrodes on emitter-like, base-like, and collector-like regions

Landscapes

  • Element Separation (AREA)
  • Bipolar Integrated Circuits (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Bipolar Transistors (AREA)
JP56058438A 1981-04-20 1981-04-20 Manufacture of semiconductor ic device Granted JPS57173972A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56058438A JPS57173972A (en) 1981-04-20 1981-04-20 Manufacture of semiconductor ic device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56058438A JPS57173972A (en) 1981-04-20 1981-04-20 Manufacture of semiconductor ic device

Publications (2)

Publication Number Publication Date
JPS57173972A true JPS57173972A (en) 1982-10-26
JPS644351B2 JPS644351B2 (enrdf_load_stackoverflow) 1989-01-25

Family

ID=13084398

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56058438A Granted JPS57173972A (en) 1981-04-20 1981-04-20 Manufacture of semiconductor ic device

Country Status (1)

Country Link
JP (1) JPS57173972A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5990925A (ja) * 1982-11-17 1984-05-25 Matsushita Electronics Corp 半導体装置の製造方法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0331215U (enrdf_load_stackoverflow) * 1989-07-28 1991-03-27

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5990925A (ja) * 1982-11-17 1984-05-25 Matsushita Electronics Corp 半導体装置の製造方法

Also Published As

Publication number Publication date
JPS644351B2 (enrdf_load_stackoverflow) 1989-01-25

Similar Documents

Publication Publication Date Title
JPS5775463A (en) Manufacture of semiconductor device
JPS57173972A (en) Manufacture of semiconductor ic device
US4037308A (en) Methods for making transistor structures
JPS57155769A (en) Manufacture of semiconductor device
US3855008A (en) Mos integrated circuit process
JPS56135975A (en) Manufacture of semiconductor device
JPS5526637A (en) Manufacturing of semiconductor device
US4037309A (en) Methods for making transistor structures
JPS57112032A (en) Formation of insulating film
JPS57120364A (en) Manufacture of semiconductor device
JPS5753957A (ja) Handotaisochinoseizohoho
JPS57173956A (en) Manufacture of semiconductor device
JPS5685853A (en) Manufacture of semiconductor device
JPS5790940A (en) Manufacture of semiconductor device
JPS5718362A (en) Semiconductor device and manufacture thereof
JPS57153462A (en) Manufacture of semiconductor integrated circuit device
JPS5759378A (en) Manufacture of semiconductor device
JPS54129983A (en) Manufacture of semiconductor device
JPS57192078A (en) Manufacture of mos semiconductor device
JPS5779641A (en) Manufacture of semiconductor device
JPS52146568A (en) Production of silicon gate mos type semiconductor integrated circuit device
JPS5753981A (en) Manufacture of semiconductor device
JPS57192073A (en) Semiconductor device
JPS5787173A (en) Manufacture of semiconductor integrated circuit
JPS5559776A (en) Method of fabricating semiconductor device