JPS57173962A - Semiconductor device - Google Patents

Semiconductor device

Info

Publication number
JPS57173962A
JPS57173962A JP6012581A JP6012581A JPS57173962A JP S57173962 A JPS57173962 A JP S57173962A JP 6012581 A JP6012581 A JP 6012581A JP 6012581 A JP6012581 A JP 6012581A JP S57173962 A JPS57173962 A JP S57173962A
Authority
JP
Japan
Prior art keywords
substrate
central region
stress
conductivity type
resistors
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6012581A
Other languages
Japanese (ja)
Inventor
Hitoshi Sato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP6012581A priority Critical patent/JPS57173962A/en
Publication of JPS57173962A publication Critical patent/JPS57173962A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/02Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
    • H01L27/04Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body
    • H01L27/08Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body including only semiconductor components of a single kind
    • H01L27/0802Resistors only

Abstract

PURPOSE:To obtain a precise ratio between two resistors by a method wherein a pair of resistors with their conductivity type reverse to that of the substrate is formed at the central region of the substrate. CONSTITUTION:On a semiconductor substrate 1 of either conductivity type, resistor elements R1-R4 are formed with their conductivity type reverse to that of the substrate 1. Stress in the substrate 1 caused by resin sealing thereof results in a piezoresistance effect causing a change in the value of resistance. The stress, the substrate is exposed to, is the greatest at the central region and smaller toward the periphery. A change in the stress, however, is the smallest at the central region. Locating a split resistor or a plurality of resistor elements R1 and R2 with the ratio of resistance between requiring precision at the central region 23 (surrounded by a quadrangle consisting of four sides each of which divides halfways the line l extending from the center 0 to a substrate side), results in a precise ratio maintained between them.
JP6012581A 1981-04-21 1981-04-21 Semiconductor device Pending JPS57173962A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6012581A JPS57173962A (en) 1981-04-21 1981-04-21 Semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6012581A JPS57173962A (en) 1981-04-21 1981-04-21 Semiconductor device

Publications (1)

Publication Number Publication Date
JPS57173962A true JPS57173962A (en) 1982-10-26

Family

ID=13133093

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6012581A Pending JPS57173962A (en) 1981-04-21 1981-04-21 Semiconductor device

Country Status (1)

Country Link
JP (1) JPS57173962A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2021018217A (en) * 2019-07-24 2021-02-15 ローム株式会社 Voltage monitoring circuit
WO2021079666A1 (en) * 2019-10-25 2021-04-29 日立Astemo株式会社 Chip temperature sensor for semiconductor chip, and flow rate measurement device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2021018217A (en) * 2019-07-24 2021-02-15 ローム株式会社 Voltage monitoring circuit
WO2021079666A1 (en) * 2019-10-25 2021-04-29 日立Astemo株式会社 Chip temperature sensor for semiconductor chip, and flow rate measurement device
JP2021067595A (en) * 2019-10-25 2021-04-30 日立Astemo株式会社 Chip temperature sensor of semiconductor chip, and flow rate measurement device

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