JPS57166400A - Vessel for liquid-phase growing of semiconductor material - Google Patents
Vessel for liquid-phase growing of semiconductor materialInfo
- Publication number
- JPS57166400A JPS57166400A JP5160381A JP5160381A JPS57166400A JP S57166400 A JPS57166400 A JP S57166400A JP 5160381 A JP5160381 A JP 5160381A JP 5160381 A JP5160381 A JP 5160381A JP S57166400 A JPS57166400 A JP S57166400A
- Authority
- JP
- Japan
- Prior art keywords
- vessel
- crystal
- semiconductor material
- liquid
- phase growing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000463 material Substances 0.000 title abstract 6
- 239000004065 semiconductor Substances 0.000 title abstract 3
- 239000007791 liquid phase Substances 0.000 title 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 4
- 239000013078 crystal Substances 0.000 abstract 4
- 229910052681 coesite Inorganic materials 0.000 abstract 2
- 229910052906 cristobalite Inorganic materials 0.000 abstract 2
- 239000000155 melt Substances 0.000 abstract 2
- 239000000377 silicon dioxide Substances 0.000 abstract 2
- 229910052682 stishovite Inorganic materials 0.000 abstract 2
- 229910052905 tridymite Inorganic materials 0.000 abstract 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 abstract 1
- 239000011248 coating agent Substances 0.000 abstract 1
- 238000000576 coating method Methods 0.000 abstract 1
- 238000011109 contamination Methods 0.000 abstract 1
- 229910052593 corundum Inorganic materials 0.000 abstract 1
- 229910001845 yogo sapphire Inorganic materials 0.000 abstract 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5160381A JPS57166400A (en) | 1981-04-06 | 1981-04-06 | Vessel for liquid-phase growing of semiconductor material |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5160381A JPS57166400A (en) | 1981-04-06 | 1981-04-06 | Vessel for liquid-phase growing of semiconductor material |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57166400A true JPS57166400A (en) | 1982-10-13 |
| JPS6116756B2 JPS6116756B2 (enrdf_load_stackoverflow) | 1986-05-01 |
Family
ID=12891469
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5160381A Granted JPS57166400A (en) | 1981-04-06 | 1981-04-06 | Vessel for liquid-phase growing of semiconductor material |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57166400A (enrdf_load_stackoverflow) |
-
1981
- 1981-04-06 JP JP5160381A patent/JPS57166400A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6116756B2 (enrdf_load_stackoverflow) | 1986-05-01 |
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