JPS57161066A - Removing method for metallic oxide film - Google Patents

Removing method for metallic oxide film

Info

Publication number
JPS57161066A
JPS57161066A JP4663381A JP4663381A JPS57161066A JP S57161066 A JPS57161066 A JP S57161066A JP 4663381 A JP4663381 A JP 4663381A JP 4663381 A JP4663381 A JP 4663381A JP S57161066 A JPS57161066 A JP S57161066A
Authority
JP
Japan
Prior art keywords
stuck
metallic oxide
films
substrate
oxide film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4663381A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6332868B2 (cg-RX-API-DMAC10.html
Inventor
Hideo Kawahara
Koichi Ataka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Sheet Glass Co Ltd
Original Assignee
Nippon Sheet Glass Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Sheet Glass Co Ltd filed Critical Nippon Sheet Glass Co Ltd
Priority to JP4663381A priority Critical patent/JPS57161066A/ja
Publication of JPS57161066A publication Critical patent/JPS57161066A/ja
Publication of JPS6332868B2 publication Critical patent/JPS6332868B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
JP4663381A 1981-03-30 1981-03-30 Removing method for metallic oxide film Granted JPS57161066A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4663381A JPS57161066A (en) 1981-03-30 1981-03-30 Removing method for metallic oxide film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4663381A JPS57161066A (en) 1981-03-30 1981-03-30 Removing method for metallic oxide film

Publications (2)

Publication Number Publication Date
JPS57161066A true JPS57161066A (en) 1982-10-04
JPS6332868B2 JPS6332868B2 (cg-RX-API-DMAC10.html) 1988-07-01

Family

ID=12752692

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4663381A Granted JPS57161066A (en) 1981-03-30 1981-03-30 Removing method for metallic oxide film

Country Status (1)

Country Link
JP (1) JPS57161066A (cg-RX-API-DMAC10.html)

Also Published As

Publication number Publication date
JPS6332868B2 (cg-RX-API-DMAC10.html) 1988-07-01

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