JPS57160114A - High speed sputtering apparatus for ferromagnetic body - Google Patents

High speed sputtering apparatus for ferromagnetic body

Info

Publication number
JPS57160114A
JPS57160114A JP4413381A JP4413381A JPS57160114A JP S57160114 A JPS57160114 A JP S57160114A JP 4413381 A JP4413381 A JP 4413381A JP 4413381 A JP4413381 A JP 4413381A JP S57160114 A JPS57160114 A JP S57160114A
Authority
JP
Japan
Prior art keywords
target
ferromagnetic body
providing
ferromagnetic
high speed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4413381A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0243329B2 (enrdf_load_stackoverflow
Inventor
Kyuzo Nakamura
Yoshifumi Oota
Hiroki Yamada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Nihon Shinku Gijutsu KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc, Nihon Shinku Gijutsu KK filed Critical Ulvac Inc
Priority to JP4413381A priority Critical patent/JPS57160114A/ja
Priority to CH1682/82A priority patent/CH649578A5/de
Priority to US06/361,629 priority patent/US4401546A/en
Priority to DE19823211229 priority patent/DE3211229A1/de
Publication of JPS57160114A publication Critical patent/JPS57160114A/ja
Publication of JPH0243329B2 publication Critical patent/JPH0243329B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3411—Constructional aspects of the reactor
    • H01J37/3414—Targets
    • H01J37/3423—Shape
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
    • C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
    • H01F41/14—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates
    • H01F41/18—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates by cathode sputtering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3411—Constructional aspects of the reactor
    • H01J37/3414—Targets
    • H01J37/3426—Material

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Power Engineering (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physical Vapour Deposition (AREA)
  • Thin Magnetic Films (AREA)
JP4413381A 1981-03-27 1981-03-27 High speed sputtering apparatus for ferromagnetic body Granted JPS57160114A (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP4413381A JPS57160114A (en) 1981-03-27 1981-03-27 High speed sputtering apparatus for ferromagnetic body
CH1682/82A CH649578A5 (de) 1981-03-27 1982-03-18 Hochgeschwindigkeits-kathoden-zerstaeubungsvorrichtung.
US06/361,629 US4401546A (en) 1981-03-27 1982-03-25 Ferromagnetic high speed sputtering apparatus
DE19823211229 DE3211229A1 (de) 1981-03-27 1982-03-26 Vorrichtung zur ferromagnetischen schnellzerstaeubung

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4413381A JPS57160114A (en) 1981-03-27 1981-03-27 High speed sputtering apparatus for ferromagnetic body

Publications (2)

Publication Number Publication Date
JPS57160114A true JPS57160114A (en) 1982-10-02
JPH0243329B2 JPH0243329B2 (enrdf_load_stackoverflow) 1990-09-28

Family

ID=12683121

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4413381A Granted JPS57160114A (en) 1981-03-27 1981-03-27 High speed sputtering apparatus for ferromagnetic body

Country Status (1)

Country Link
JP (1) JPS57160114A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5938385A (ja) * 1982-08-16 1984-03-02 ヴアツクテツク・システムズ・インコ−ポレ−テツド スパツタリング装置
JPH06108248A (ja) * 1992-09-30 1994-04-19 Shibaura Eng Works Co Ltd スパッタリング源

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5938385A (ja) * 1982-08-16 1984-03-02 ヴアツクテツク・システムズ・インコ−ポレ−テツド スパツタリング装置
JPH06108248A (ja) * 1992-09-30 1994-04-19 Shibaura Eng Works Co Ltd スパッタリング源

Also Published As

Publication number Publication date
JPH0243329B2 (enrdf_load_stackoverflow) 1990-09-28

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