JPS57158373A - Method and device for controlling film thickness of vacuum deposited film - Google Patents

Method and device for controlling film thickness of vacuum deposited film

Info

Publication number
JPS57158373A
JPS57158373A JP56044457A JP4445781A JPS57158373A JP S57158373 A JPS57158373 A JP S57158373A JP 56044457 A JP56044457 A JP 56044457A JP 4445781 A JP4445781 A JP 4445781A JP S57158373 A JPS57158373 A JP S57158373A
Authority
JP
Japan
Prior art keywords
film thickness
monitors
reflectivities
substrates
monitor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56044457A
Other languages
English (en)
Other versions
JPS6145702B2 (ja
Inventor
Mitsuharu Sawamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP56044457A priority Critical patent/JPS57158373A/ja
Priority to US06/359,481 priority patent/US4531838A/en
Publication of JPS57158373A publication Critical patent/JPS57158373A/ja
Publication of JPS6145702B2 publication Critical patent/JPS6145702B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C23C14/542—Controlling the film thickness or evaporation rate
    • C23C14/545—Controlling the film thickness or evaporation rate using measurement on deposited material
    • C23C14/547—Controlling the film thickness or evaporation rate using measurement on deposited material using optical methods
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • G01B11/0683—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating measurement during deposition or removal of the layer

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Physical Vapour Deposition (AREA)
JP56044457A 1981-03-26 1981-03-26 Method and device for controlling film thickness of vacuum deposited film Granted JPS57158373A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP56044457A JPS57158373A (en) 1981-03-26 1981-03-26 Method and device for controlling film thickness of vacuum deposited film
US06/359,481 US4531838A (en) 1981-03-26 1982-03-18 Method and device for controlling the film thickness of evaporated film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56044457A JPS57158373A (en) 1981-03-26 1981-03-26 Method and device for controlling film thickness of vacuum deposited film

Publications (2)

Publication Number Publication Date
JPS57158373A true JPS57158373A (en) 1982-09-30
JPS6145702B2 JPS6145702B2 (ja) 1986-10-09

Family

ID=12692012

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56044457A Granted JPS57158373A (en) 1981-03-26 1981-03-26 Method and device for controlling film thickness of vacuum deposited film

Country Status (2)

Country Link
US (1) US4531838A (ja)
JP (1) JPS57158373A (ja)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3309101B2 (ja) * 1992-08-31 2002-07-29 株式会社シンクロン 薄膜の屈折率測定方法および装置
US5416594A (en) * 1993-07-20 1995-05-16 Tencor Instruments Surface scanner with thin film gauge
US6611378B1 (en) 2001-12-20 2003-08-26 Semrock, Inc. Thin-film interference filter with quarter-wavelength unit sub-layers arranged in a generalized pattern
KR100794672B1 (ko) 2006-07-06 2008-01-14 (주)인텍 진공 증착기
CN101538699B (zh) * 2008-03-17 2012-06-20 鸿富锦精密工业（深圳）有限公司 镀膜装置及其所使用的镀膜伞架遮罩
CN101597747B (zh) * 2008-06-05 2012-06-20 鸿富锦精密工业（深圳）有限公司 光学镀膜装置
JP6550101B2 (ja) * 2017-07-13 2019-07-24 Ｊｆｅテクノリサーチ株式会社 膜厚測定方法及び膜厚測定装置
CN110793942B (zh) * 2019-10-12 2022-02-08 天津大学 基于彩色相机的二维材料形貌快速表征系统和方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3645623A (en) * 1970-09-25 1972-02-29 Raymond A Patten Apparatus for monitoring film thickness by reflecting a light beam from the film surface
US3737237A (en) * 1971-11-18 1973-06-05 Nasa Monitoring deposition of films
US3869211A (en) * 1972-06-29 1975-03-04 Canon Kk Instrument for measuring thickness of thin film

Also Published As

Publication number Publication date
JPS6145702B2 (ja) 1986-10-09
US4531838A (en) 1985-07-30

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