JPS57152654A - Ionic current measuring device - Google Patents

Ionic current measuring device

Info

Publication number
JPS57152654A
JPS57152654A JP3796781A JP3796781A JPS57152654A JP S57152654 A JPS57152654 A JP S57152654A JP 3796781 A JP3796781 A JP 3796781A JP 3796781 A JP3796781 A JP 3796781A JP S57152654 A JPS57152654 A JP S57152654A
Authority
JP
Japan
Prior art keywords
ionic current
voltage
comparators
power source
converter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3796781A
Other languages
Japanese (ja)
Inventor
Yoshiichi Tamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Anelva Corp
Original Assignee
Anelva Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Anelva Corp filed Critical Anelva Corp
Priority to JP3796781A priority Critical patent/JPS57152654A/en
Publication of JPS57152654A publication Critical patent/JPS57152654A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/02—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas
    • H01J41/04—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas with ionisation by means of thermionic cathodes

Landscapes

  • Measurement Of Radiation (AREA)

Abstract

PURPOSE:To prevent any breakdown of a filament which might be caused due to rapid decrease of the vacuum degree by cutting out a heating filament power source when the increasing speed of the ionic current exceeds a given value. CONSTITUTION:A current-voltage converter 1 receives an ionic current introduced from a vacuum case V by means of a lead wire, and converts the above ionic current into voltage. Next, the voltage converted by the converter 1 is compared with critical standard voltages set by comparators 2 and 3, and signals given from the comparators 2 and 3 are applied to a range change-over controlling circuit 4, in which the range change-over is carried out normally. Here, when a voltage change rate exceeding the tolerance is detected by a variation detecting circuit 6, a filament power source 7 is adjusted to a cut- out state.
JP3796781A 1981-03-18 1981-03-18 Ionic current measuring device Pending JPS57152654A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3796781A JPS57152654A (en) 1981-03-18 1981-03-18 Ionic current measuring device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3796781A JPS57152654A (en) 1981-03-18 1981-03-18 Ionic current measuring device

Publications (1)

Publication Number Publication Date
JPS57152654A true JPS57152654A (en) 1982-09-21

Family

ID=12512330

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3796781A Pending JPS57152654A (en) 1981-03-18 1981-03-18 Ionic current measuring device

Country Status (1)

Country Link
JP (1) JPS57152654A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2587112A1 (en) * 1985-06-27 1987-03-13 Uk G P HALOGENES LEAK DETECTOR
JP2009544140A (en) * 2006-07-18 2009-12-10 ブルックス オートメーション インコーポレイテッド Method and apparatus for maintaining hot cathode emission performance in harsh environments

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2587112A1 (en) * 1985-06-27 1987-03-13 Uk G P HALOGENES LEAK DETECTOR
JP2009544140A (en) * 2006-07-18 2009-12-10 ブルックス オートメーション インコーポレイテッド Method and apparatus for maintaining hot cathode emission performance in harsh environments

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