JPS5715219A - Magnetic resistance head and its manufacture - Google Patents

Magnetic resistance head and its manufacture

Info

Publication number
JPS5715219A
JPS5715219A JP9114480A JP9114480A JPS5715219A JP S5715219 A JPS5715219 A JP S5715219A JP 9114480 A JP9114480 A JP 9114480A JP 9114480 A JP9114480 A JP 9114480A JP S5715219 A JPS5715219 A JP S5715219A
Authority
JP
Japan
Prior art keywords
magnetic resistance
resistance element
film
signal lead
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9114480A
Other languages
Japanese (ja)
Inventor
Hisatoshi Kuzumi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP9114480A priority Critical patent/JPS5715219A/en
Publication of JPS5715219A publication Critical patent/JPS5715219A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/33—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
    • G11B5/39—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
    • G11B5/3903—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects using magnetic thin film layers or their effects, the films being part of integrated structures

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Magnetic Heads (AREA)

Abstract

PURPOSE:To obtain stable quality and an easy manufacturing method by increasing the area of contact between a magnetic resistance element and a signal lead-out electrode part by elongating the magnetic resistance element to the entire surface of said electrode part, and by forming a magnetic resistance element film and an electrode film in the same vacuum chamber. CONSTITUTION:A magnetic resistance element film and an electrode film are formed in the same vacuum chamber by continuous sputtering or vapor deposition. In a process 7g, a photoresist pattern where signal lead-out electrodes 2 and 2 are stuck on a magnetic resistance element 1 is formed, and Fe-Ni and Al or Au are etched with the same pattern. In a process 7j, a photoresist pattern is formed for etching to form an electrode film which is a part equivalent to a gap between signal lead-out electrodes 2 and 2. In this process, using a positive photoresist eliminates resist slag between the magnetic resistance element and signal lead-out electrodes, and little oxide coating of the magnetic resistance film interposes.
JP9114480A 1980-07-01 1980-07-01 Magnetic resistance head and its manufacture Pending JPS5715219A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9114480A JPS5715219A (en) 1980-07-01 1980-07-01 Magnetic resistance head and its manufacture

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9114480A JPS5715219A (en) 1980-07-01 1980-07-01 Magnetic resistance head and its manufacture

Publications (1)

Publication Number Publication Date
JPS5715219A true JPS5715219A (en) 1982-01-26

Family

ID=14018323

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9114480A Pending JPS5715219A (en) 1980-07-01 1980-07-01 Magnetic resistance head and its manufacture

Country Status (1)

Country Link
JP (1) JPS5715219A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6081898A (en) * 1983-10-11 1985-05-09 ソニー株式会社 Method of producing ceramic circuit board

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6081898A (en) * 1983-10-11 1985-05-09 ソニー株式会社 Method of producing ceramic circuit board
JPH0566760B2 (en) * 1983-10-11 1993-09-22 Sony Corp

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