JPS57147624A - Contact exposure device - Google Patents
Contact exposure deviceInfo
- Publication number
- JPS57147624A JPS57147624A JP56033559A JP3355981A JPS57147624A JP S57147624 A JPS57147624 A JP S57147624A JP 56033559 A JP56033559 A JP 56033559A JP 3355981 A JP3355981 A JP 3355981A JP S57147624 A JPS57147624 A JP S57147624A
- Authority
- JP
- Japan
- Prior art keywords
- contact
- substrate
- holding plate
- air
- closely
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
- G03B27/00—Photographic printing apparatus
- G03B27/02—Exposure apparatus for contact printing
- G03B27/14—Details
- G03B27/18—Maintaining or producing contact pressure between original and light-sensitive material
- G03B27/20—Maintaining or producing contact pressure between original and light-sensitive material by using a vacuum or fluid pressure
Landscapes
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- General Physics & Mathematics (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP56033559A JPS57147624A (en) | 1981-03-09 | 1981-03-09 | Contact exposure device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP56033559A JPS57147624A (en) | 1981-03-09 | 1981-03-09 | Contact exposure device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS57147624A true JPS57147624A (en) | 1982-09-11 |
Family
ID=12389903
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP56033559A Pending JPS57147624A (en) | 1981-03-09 | 1981-03-09 | Contact exposure device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57147624A (ja) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63175859A (ja) * | 1987-01-16 | 1988-07-20 | Ushio Inc | 液晶基板製作の露光方式 |
JPH0269325U (ja) * | 1988-11-11 | 1990-05-25 | ||
JPH03123338A (ja) * | 1989-09-28 | 1991-05-27 | American Teleph & Telegr Co <Att> | 密着プリンティング・プロセスにおけるフォトレジスト層内パターン明確化方法 |
EP0953878A2 (en) * | 1998-04-28 | 1999-11-03 | Ushiodenki Kabushiki Kaisha | Contact exposure process and device |
-
1981
- 1981-03-09 JP JP56033559A patent/JPS57147624A/ja active Pending
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63175859A (ja) * | 1987-01-16 | 1988-07-20 | Ushio Inc | 液晶基板製作の露光方式 |
JPH0269325U (ja) * | 1988-11-11 | 1990-05-25 | ||
JPH03123338A (ja) * | 1989-09-28 | 1991-05-27 | American Teleph & Telegr Co <Att> | 密着プリンティング・プロセスにおけるフォトレジスト層内パターン明確化方法 |
EP0953878A2 (en) * | 1998-04-28 | 1999-11-03 | Ushiodenki Kabushiki Kaisha | Contact exposure process and device |
EP0953878A3 (en) * | 1998-04-28 | 2002-06-12 | Ushiodenki Kabushiki Kaisha | Contact exposure process and device |
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