JPS57145978A - Formation of protective film - Google Patents

Formation of protective film

Info

Publication number
JPS57145978A
JPS57145978A JP56031840A JP3184081A JPS57145978A JP S57145978 A JPS57145978 A JP S57145978A JP 56031840 A JP56031840 A JP 56031840A JP 3184081 A JP3184081 A JP 3184081A JP S57145978 A JPS57145978 A JP S57145978A
Authority
JP
Japan
Prior art keywords
protective film
substrate
target
film
formation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56031840A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0112833B2 (enrdf_load_stackoverflow
Inventor
Kunio Hibino
Takashi Suzuki
Toshiaki Kunieda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP56031840A priority Critical patent/JPS57145978A/ja
Publication of JPS57145978A publication Critical patent/JPS57145978A/ja
Publication of JPH0112833B2 publication Critical patent/JPH0112833B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/12—Organic material

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Magnetic Record Carriers (AREA)
  • Formation Of Insulating Films (AREA)
JP56031840A 1981-03-04 1981-03-04 Formation of protective film Granted JPS57145978A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56031840A JPS57145978A (en) 1981-03-04 1981-03-04 Formation of protective film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56031840A JPS57145978A (en) 1981-03-04 1981-03-04 Formation of protective film

Publications (2)

Publication Number Publication Date
JPS57145978A true JPS57145978A (en) 1982-09-09
JPH0112833B2 JPH0112833B2 (enrdf_load_stackoverflow) 1989-03-02

Family

ID=12342246

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56031840A Granted JPS57145978A (en) 1981-03-04 1981-03-04 Formation of protective film

Country Status (1)

Country Link
JP (1) JPS57145978A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0112833B2 (enrdf_load_stackoverflow) 1989-03-02

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