JPS57145978A - Formation of protective film - Google Patents
Formation of protective filmInfo
- Publication number
- JPS57145978A JPS57145978A JP3184081A JP3184081A JPS57145978A JP S57145978 A JPS57145978 A JP S57145978A JP 3184081 A JP3184081 A JP 3184081A JP 3184081 A JP3184081 A JP 3184081A JP S57145978 A JPS57145978 A JP S57145978A
- Authority
- JP
- Japan
- Prior art keywords
- protective film
- substrate
- target
- film
- formation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000001681 protective effect Effects 0.000 title abstract 4
- 230000015572 biosynthetic process Effects 0.000 title abstract 2
- 239000010408 film Substances 0.000 abstract 4
- 239000000758 substrate Substances 0.000 abstract 3
- 125000003118 aryl group Chemical group 0.000 abstract 2
- 239000007789 gas Substances 0.000 abstract 2
- 239000011261 inert gas Substances 0.000 abstract 2
- 229920000728 polyester Polymers 0.000 abstract 2
- 229920001169 thermoplastic Polymers 0.000 abstract 2
- 239000004416 thermosoftening plastic Substances 0.000 abstract 2
- 239000010409 thin film Substances 0.000 abstract 2
- 238000005260 corrosion Methods 0.000 abstract 1
- 230000007797 corrosion Effects 0.000 abstract 1
- 238000000151 deposition Methods 0.000 abstract 1
- 238000010849 ion bombardment Methods 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
- 239000002985 plastic film Substances 0.000 abstract 1
- 229920006255 plastic film Polymers 0.000 abstract 1
- 238000001552 radio frequency sputter deposition Methods 0.000 abstract 1
- 238000004544 sputter deposition Methods 0.000 abstract 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/12—Organic material
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Magnetic Record Carriers (AREA)
- Formation Of Insulating Films (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3184081A JPS57145978A (en) | 1981-03-04 | 1981-03-04 | Formation of protective film |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3184081A JPS57145978A (en) | 1981-03-04 | 1981-03-04 | Formation of protective film |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57145978A true JPS57145978A (en) | 1982-09-09 |
| JPH0112833B2 JPH0112833B2 (enrdf_load_stackoverflow) | 1989-03-02 |
Family
ID=12342246
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3184081A Granted JPS57145978A (en) | 1981-03-04 | 1981-03-04 | Formation of protective film |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57145978A (enrdf_load_stackoverflow) |
-
1981
- 1981-03-04 JP JP3184081A patent/JPS57145978A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0112833B2 (enrdf_load_stackoverflow) | 1989-03-02 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS5615014A (en) | Metallic thin film type magnetic recording medium | |
| GB1492164A (en) | Method of forming iron oxide films | |
| JPS5671821A (en) | Substrate for magnetic disc and its manufacture | |
| JPS5798133A (en) | Magnetic recording medium | |
| JPS57183004A (en) | Magnetically recording medium | |
| JPS57145979A (en) | Formation of protective film | |
| JPS57145978A (en) | Formation of protective film | |
| JPS57145977A (en) | Formation of protective film | |
| JPS57145980A (en) | Formation of protective film | |
| EP0151861A3 (en) | Thermally controlled sputtering of high anisotropy magnetic material | |
| JPS57200945A (en) | Magnetic recording medium | |
| JPS57138035A (en) | Magnetic recording medium | |
| JPS54140505A (en) | Production of magnetic recording medium | |
| JPS57164433A (en) | Magnetic recording medium and its manufacture | |
| JPS5755531A (en) | Vertical magnetic recording medium | |
| Hieber | Radio-Frequency Sputter Deposition of Alloy Films | |
| JPS57141025A (en) | Production for magnetic recording medium | |
| JPS54141107A (en) | Magnetic recording medium | |
| JPS57105838A (en) | Photo-thermal magnetic recording medium | |
| JPS57116771A (en) | Formation of protecting film | |
| JPS5680831A (en) | Producing device for magnetic recording medium | |
| JPS57167132A (en) | Production for magnetic recording medium | |
| Trippel et al. | Iron--Cobalt and Iron--Cobalt--Chromium Thin Film Recording Media, Deposited by E-Beam Evaporation at Oblique Angle of Incidence | |
| JPS56118321A (en) | Forming method for preliminary protecting film | |
| JPS57105839A (en) | Photo-thermal magnetic recording medium |