JPS57143785A - Magnetic bubble memory element - Google Patents
Magnetic bubble memory elementInfo
- Publication number
- JPS57143785A JPS57143785A JP2679281A JP2679281A JPS57143785A JP S57143785 A JPS57143785 A JP S57143785A JP 2679281 A JP2679281 A JP 2679281A JP 2679281 A JP2679281 A JP 2679281A JP S57143785 A JPS57143785 A JP S57143785A
- Authority
- JP
- Japan
- Prior art keywords
- memory element
- magnetic bubble
- bubble memory
- mask
- resist
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To obtain a magnetic bubble memory element less dispersion in dimension over a wide range, by splitting the element into suitable regions and forming the element through exposure to resist with a plurality of photo masks.
CONSTITUTION: In forming the 1st conductive layer of a magnetic bubble memory element, the element is split up and down into two to form the upper half mask ordinary drawing 6 and the lower half ordinary drawing 9. Mask alignment patterns 7, 8 and 11 and a pattern 12 to avoid exposure are provided. Photo masks (a) and (b) having patterns 14 and 15 shrinking the ordinary drawings 6 and 9 into 1/10 are made. First, the photo mask (a) is exposed and developed on a resist to form a resist pattern on a substrate. Next, after mask alignment using a mask alignment pattern 7, a resist pattern by the photo mask (b) is made. This is done as the same for the 2nd and succeeding layers. Thus, the magnetic bubble memory element without dispersion of size over a wide range is achieved.
COPYRIGHT: (C)1982,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2679281A JPS57143785A (en) | 1981-02-27 | 1981-02-27 | Magnetic bubble memory element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2679281A JPS57143785A (en) | 1981-02-27 | 1981-02-27 | Magnetic bubble memory element |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS57143785A true JPS57143785A (en) | 1982-09-06 |
Family
ID=12203162
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2679281A Pending JPS57143785A (en) | 1981-02-27 | 1981-02-27 | Magnetic bubble memory element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57143785A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5889805A (en) * | 1981-11-25 | 1983-05-28 | Fujitsu Ltd | Manufacture of magnetic bubble memory element |
| JPS58200485A (en) * | 1982-05-19 | 1983-11-22 | Hitachi Ltd | Magnetic bubble element |
-
1981
- 1981-02-27 JP JP2679281A patent/JPS57143785A/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5889805A (en) * | 1981-11-25 | 1983-05-28 | Fujitsu Ltd | Manufacture of magnetic bubble memory element |
| JPH0213392B2 (en) * | 1981-11-25 | 1990-04-04 | Fujitsu Ltd | |
| JPS58200485A (en) * | 1982-05-19 | 1983-11-22 | Hitachi Ltd | Magnetic bubble element |
| JPH0223956B2 (en) * | 1982-05-19 | 1990-05-25 | Hitachi Ltd |
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