JPS57141539A - Spectrometer for multicomponent measurement - Google Patents

Spectrometer for multicomponent measurement

Info

Publication number
JPS57141539A
JPS57141539A JP9704179A JP9704179A JPS57141539A JP S57141539 A JPS57141539 A JP S57141539A JP 9704179 A JP9704179 A JP 9704179A JP 9704179 A JP9704179 A JP 9704179A JP S57141539 A JPS57141539 A JP S57141539A
Authority
JP
Japan
Prior art keywords
optical axis
spectrometer
modulator
regulated
regulation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9704179A
Other languages
Japanese (ja)
Other versions
JPS649564B2 (en
Inventor
Keigo Nakamura
Takusuke Izumi
Shozo Sekino
Asaji Shimizu
Nobuaki Takeda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Anritsu Corp
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Anritsu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology, Anritsu Corp filed Critical Agency of Industrial Science and Technology
Priority to JP9704179A priority Critical patent/JPS57141539A/en
Publication of JPS57141539A publication Critical patent/JPS57141539A/en
Publication of JPS649564B2 publication Critical patent/JPS649564B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/42—Absorption spectrometry; Double beam spectrometry; Flicker spectrometry; Reflection spectrometry
    • G01J3/433—Modulation spectrometry; Derivative spectrometry

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

PURPOSE:To perform a highly stable and accurate measurement, by arranging only one wavelength modulator in a spectrometer and providing a slit for optical axis regulation to a marker for optical axis regulation or an exit slit plate and making a slight regulation mechanism only an exit slit slight regulation mechanism. CONSTITUTION:Light from a light source 5 is made incident to a spectrometer 20 from an exit slit 21 through an absorption cell 6 for microanalysis of gas or liquid, especially for three components measurement of SO2, NO, NO2 in flue exhaust gas. Only one attachable and detachable refraction board twist oscillation type wavelength modulator 29 is provided in the spectrometer 20. At first, the modulator is taken off and a collimator mirror 22 and a diffraction grating 23, are arranged on a attachable and detachable marker 57 at a position irradiating a zero order diffraction light 4 and then, an optical axis is regulated. Or a collector mirror 25 is regulated by an exit slit 26 for optical axis regulation and the optical axis is regulated. Next, the modulator 29 is placed and luminous flux from exit slits 27, 27', 27'' of each component luminous flux are converted into signals by using inexpensive side-on type photoelectric converters 40, 40', 40''. Then, said signal is inputted into a signal processing equipment 100 to obtain the display of each component. In this manner, the measurement of three components is achieved by one apparatus.
JP9704179A 1979-07-30 1979-07-30 Spectrometer for multicomponent measurement Granted JPS57141539A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9704179A JPS57141539A (en) 1979-07-30 1979-07-30 Spectrometer for multicomponent measurement

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9704179A JPS57141539A (en) 1979-07-30 1979-07-30 Spectrometer for multicomponent measurement

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP16488284A Division JPS617427A (en) 1984-08-08 1984-08-08 Wavelength sweeping spectroscope using mirror vibrated by tuning fork

Publications (2)

Publication Number Publication Date
JPS57141539A true JPS57141539A (en) 1982-09-01
JPS649564B2 JPS649564B2 (en) 1989-02-17

Family

ID=14181485

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9704179A Granted JPS57141539A (en) 1979-07-30 1979-07-30 Spectrometer for multicomponent measurement

Country Status (1)

Country Link
JP (1) JPS57141539A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60170746U (en) * 1984-04-23 1985-11-12 アンリツ株式会社 Spectrometer exit slit device
JPS6357531U (en) * 1986-09-30 1988-04-16

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5458182U (en) * 1977-09-30 1979-04-21
JPS5489573A (en) * 1977-12-27 1979-07-16 Fujitsu Ltd Semiconductor device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5458182U (en) * 1977-09-30 1979-04-21
JPS5489573A (en) * 1977-12-27 1979-07-16 Fujitsu Ltd Semiconductor device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60170746U (en) * 1984-04-23 1985-11-12 アンリツ株式会社 Spectrometer exit slit device
JPS6357531U (en) * 1986-09-30 1988-04-16

Also Published As

Publication number Publication date
JPS649564B2 (en) 1989-02-17

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