JPS57137805A - Inspecting method repetitive patterns - Google Patents

Inspecting method repetitive patterns

Info

Publication number
JPS57137805A
JPS57137805A JP2389681A JP2389681A JPS57137805A JP S57137805 A JPS57137805 A JP S57137805A JP 2389681 A JP2389681 A JP 2389681A JP 2389681 A JP2389681 A JP 2389681A JP S57137805 A JPS57137805 A JP S57137805A
Authority
JP
Japan
Prior art keywords
patterns
signal
repetitive
light
repetitive patterns
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2389681A
Other languages
Japanese (ja)
Inventor
Kazuo Watanabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dai Nippon Printing Co Ltd
Original Assignee
Dai Nippon Printing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dai Nippon Printing Co Ltd filed Critical Dai Nippon Printing Co Ltd
Priority to JP2389681A priority Critical patent/JPS57137805A/en
Publication of JPS57137805A publication Critical patent/JPS57137805A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects

Abstract

PURPOSE:To detect the defects of repetitive patterns at a constant speed with high reliability by delaying the signal of the quantity of transmitted light through the repetitive patterns by the time corresponding to the repetitive pitches of the patterns and determining the difference between this and the signal of the quantity of light of this time. CONSTITUTION:An object 24 of repetitive patterns like, for example, checkered patterns, disposed on a stage 23 is irradiated with the scanning light 22 from a light source 1, and the signal TL of the quantity of transmitted light is obtained. The signal TLA past an amplifier 27 is delayed by the preset prescribed time (as much as integer times the repetitive pitches of the patterns of the object 24) in a delay circuit 29 to the signal TLB. The difference DS between the two signals TLA and TLB is obtained with a differential amplifier 28, and this is inputted together with a stage position signal ST into an arithmetic circuit by which the defect parts of the patterns are specified.
JP2389681A 1981-02-20 1981-02-20 Inspecting method repetitive patterns Pending JPS57137805A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2389681A JPS57137805A (en) 1981-02-20 1981-02-20 Inspecting method repetitive patterns

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2389681A JPS57137805A (en) 1981-02-20 1981-02-20 Inspecting method repetitive patterns

Publications (1)

Publication Number Publication Date
JPS57137805A true JPS57137805A (en) 1982-08-25

Family

ID=12123212

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2389681A Pending JPS57137805A (en) 1981-02-20 1981-02-20 Inspecting method repetitive patterns

Country Status (1)

Country Link
JP (1) JPS57137805A (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5574409A (en) * 1978-11-30 1980-06-05 Fujitsu Ltd Defect inspection system of repetitive pattern

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5574409A (en) * 1978-11-30 1980-06-05 Fujitsu Ltd Defect inspection system of repetitive pattern

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