JPS57136753A - Stroboscopic scanning electron microscope - Google Patents

Stroboscopic scanning electron microscope

Info

Publication number
JPS57136753A
JPS57136753A JP2149881A JP2149881A JPS57136753A JP S57136753 A JPS57136753 A JP S57136753A JP 2149881 A JP2149881 A JP 2149881A JP 2149881 A JP2149881 A JP 2149881A JP S57136753 A JPS57136753 A JP S57136753A
Authority
JP
Japan
Prior art keywords
electron microscope
effect
computer
beam irradiation
scanning electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2149881A
Other languages
Japanese (ja)
Inventor
Tsutomu Minagawa
Shuji Kitaoka
Mitsuaki Ishikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP2149881A priority Critical patent/JPS57136753A/en
Publication of JPS57136753A publication Critical patent/JPS57136753A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/266—Measurement of magnetic- or electric fields in the object; Lorentzmicroscopy
    • H01J37/268—Measurement of magnetic- or electric fields in the object; Lorentzmicroscopy with scanning beams

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)

Abstract

PURPOSE:To minimize the beam irradiation time and reduce the effect due to the irradiation effect on elements by detecting secondary electrons from pulse beam irradiation with a detector, and inputting and treating outputs form it to a peak-holding circuit. CONSTITUTION:A storoboscopic scanning electron microscope 1 and scan controller 12 are operated by controlling a controller 10 with a computer 8. The peak value of analogue output signal form a secondary electron detector 2 of the electron microscope 1 is holded with a high speed type peak-holding circuit 3, and it is converted to digital signal with a convertor 6 and input to the computer 8 and displayed on a CRT14 as an image. Thus data are input to the computer 8 for each beam, the beam irradiation time can be minimized, and the reverse effect on elements which are sensitive to the effect of beam such as MOS element can be reduced.
JP2149881A 1981-02-18 1981-02-18 Stroboscopic scanning electron microscope Pending JPS57136753A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2149881A JPS57136753A (en) 1981-02-18 1981-02-18 Stroboscopic scanning electron microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2149881A JPS57136753A (en) 1981-02-18 1981-02-18 Stroboscopic scanning electron microscope

Publications (1)

Publication Number Publication Date
JPS57136753A true JPS57136753A (en) 1982-08-23

Family

ID=12056623

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2149881A Pending JPS57136753A (en) 1981-02-18 1981-02-18 Stroboscopic scanning electron microscope

Country Status (1)

Country Link
JP (1) JPS57136753A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5946746A (en) * 1982-09-09 1984-03-16 Nichidenshi Tekunikusu:Kk Automatic focal point aligning unit for charged particle beam device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5946746A (en) * 1982-09-09 1984-03-16 Nichidenshi Tekunikusu:Kk Automatic focal point aligning unit for charged particle beam device

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