JPS5676153A - Image signal processor for scanning electron microscope - Google Patents

Image signal processor for scanning electron microscope

Info

Publication number
JPS5676153A
JPS5676153A JP15203779A JP15203779A JPS5676153A JP S5676153 A JPS5676153 A JP S5676153A JP 15203779 A JP15203779 A JP 15203779A JP 15203779 A JP15203779 A JP 15203779A JP S5676153 A JPS5676153 A JP S5676153A
Authority
JP
Japan
Prior art keywords
signal
image signal
deflection
counters
signal processor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15203779A
Other languages
Japanese (ja)
Other versions
JPS6231780B2 (en
Inventor
Hiroshi Makihira
Nobuhiko Aoki
Tomohiro Kuji
Yukio Kenbo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP15203779A priority Critical patent/JPS5676153A/en
Publication of JPS5676153A publication Critical patent/JPS5676153A/en
Publication of JPS6231780B2 publication Critical patent/JPS6231780B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)

Abstract

PURPOSE:To improve the accuracy and the speed of processing, by setting a plurality of regions in a scanning picture face while setting the scanning speed and the data take-in time for each region. CONSTITUTION:A timing control circuit 13 will produce counts for coordinate counters 14, 15, sample pulse for sample hold 22, a reset signal 55 for an integrator 21, an integrating section signal 57, a converting instruction for AD converter 59, etc. in accordance with input clock. The output from the coordinate counters 14, 15 will form the deflection signal through DA counters 16, 17. The deflection signal will deflect the electron beam 7 of a microscope through amplifiers 80, 81 while used for the deflection of CRT23 through amplifiers 82, 83. The picture image signal obtained from a detector 9 is integrated in an integrating circuit 22 then provided to CRT23 while simultaneously provided through AD converter 24 and an interface 10 to a computor 100.
JP15203779A 1979-11-26 1979-11-26 Image signal processor for scanning electron microscope Granted JPS5676153A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15203779A JPS5676153A (en) 1979-11-26 1979-11-26 Image signal processor for scanning electron microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15203779A JPS5676153A (en) 1979-11-26 1979-11-26 Image signal processor for scanning electron microscope

Publications (2)

Publication Number Publication Date
JPS5676153A true JPS5676153A (en) 1981-06-23
JPS6231780B2 JPS6231780B2 (en) 1987-07-10

Family

ID=15531668

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15203779A Granted JPS5676153A (en) 1979-11-26 1979-11-26 Image signal processor for scanning electron microscope

Country Status (1)

Country Link
JP (1) JPS5676153A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62254350A (en) * 1986-04-03 1987-11-06 Kumagai Nobuaki Improving method for sn ratio of digital scanning image in scanning type electron microscope
JP2002251975A (en) * 2001-02-26 2002-09-06 Hitachi Ltd Inspection device using electron beam and inspection method using electron beam
WO2017090204A1 (en) * 2015-11-27 2017-06-01 株式会社日立ハイテクノロジーズ Charged particle beam device and image processing method in charged particle beam device
JP2018206779A (en) * 2013-04-27 2018-12-27 ケーエルエー−テンカー コーポレイション Method and system for adaptively scanning sample during electron beam inspection

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4702472B2 (en) * 2009-07-28 2011-06-15 株式会社日立製作所 Inspection method and inspection apparatus using electron beam

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5014272A (en) * 1973-06-06 1975-02-14
JPS5019494A (en) * 1973-05-09 1975-02-28

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5019494A (en) * 1973-05-09 1975-02-28
JPS5014272A (en) * 1973-06-06 1975-02-14

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62254350A (en) * 1986-04-03 1987-11-06 Kumagai Nobuaki Improving method for sn ratio of digital scanning image in scanning type electron microscope
JPH0528465B2 (en) * 1986-04-03 1993-04-26 Oosaka Daigakucho
JP2002251975A (en) * 2001-02-26 2002-09-06 Hitachi Ltd Inspection device using electron beam and inspection method using electron beam
JP2018206779A (en) * 2013-04-27 2018-12-27 ケーエルエー−テンカー コーポレイション Method and system for adaptively scanning sample during electron beam inspection
WO2017090204A1 (en) * 2015-11-27 2017-06-01 株式会社日立ハイテクノロジーズ Charged particle beam device and image processing method in charged particle beam device
JPWO2017090204A1 (en) * 2015-11-27 2018-08-30 株式会社日立ハイテクノロジーズ Charged particle beam apparatus and image processing method in charged particle beam apparatus
US10522325B2 (en) 2015-11-27 2019-12-31 Hitachi High-Technologies Corporation Charged particle beam device and image processing method in charged particle beam device
US10763078B2 (en) 2015-11-27 2020-09-01 Hitachi High-Tech Corporation Charged particle beam device and image processing method in charged particle beam device

Also Published As

Publication number Publication date
JPS6231780B2 (en) 1987-07-10

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