JPS57136151A - Method for measuring deviation angle of cut plane of single crystal - Google Patents

Method for measuring deviation angle of cut plane of single crystal

Info

Publication number
JPS57136151A
JPS57136151A JP2328781A JP2328781A JPS57136151A JP S57136151 A JPS57136151 A JP S57136151A JP 2328781 A JP2328781 A JP 2328781A JP 2328781 A JP2328781 A JP 2328781A JP S57136151 A JPS57136151 A JP S57136151A
Authority
JP
Japan
Prior art keywords
rotary
crystal
omega
axis
angle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2328781A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0459581B2 (enrdf_load_stackoverflow
Inventor
Tetsuo Kikuchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
RIGAKU DENKI KK
Rigaku Denki Co Ltd
Original Assignee
RIGAKU DENKI KK
Rigaku Denki Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by RIGAKU DENKI KK, Rigaku Denki Co Ltd filed Critical RIGAKU DENKI KK
Priority to JP2328781A priority Critical patent/JPS57136151A/ja
Publication of JPS57136151A publication Critical patent/JPS57136151A/ja
Publication of JPH0459581B2 publication Critical patent/JPH0459581B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
    • G01N23/207—Diffractometry using detectors, e.g. using a probe in a central position and one or more displaceable detectors in circumferential positions

Landscapes

  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP2328781A 1981-02-18 1981-02-18 Method for measuring deviation angle of cut plane of single crystal Granted JPS57136151A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2328781A JPS57136151A (en) 1981-02-18 1981-02-18 Method for measuring deviation angle of cut plane of single crystal

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2328781A JPS57136151A (en) 1981-02-18 1981-02-18 Method for measuring deviation angle of cut plane of single crystal

Publications (2)

Publication Number Publication Date
JPS57136151A true JPS57136151A (en) 1982-08-23
JPH0459581B2 JPH0459581B2 (enrdf_load_stackoverflow) 1992-09-22

Family

ID=12106384

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2328781A Granted JPS57136151A (en) 1981-02-18 1981-02-18 Method for measuring deviation angle of cut plane of single crystal

Country Status (1)

Country Link
JP (1) JPS57136151A (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102004045145B4 (de) * 2003-10-14 2006-07-06 Rigaku Corp., Akishima Verfahren zur Kristallorientierungsmessung mittels Röntgenstrahlung und Vorrichtung zur Kristallorientierungsmessung mittels Röntgenstrahlung
CN103257150A (zh) * 2012-08-31 2013-08-21 云南北方驰宏光电有限公司 直接测量晶向偏离角的晶体定向仪及测量方法
JP2016505816A (ja) * 2012-11-16 2016-02-25 コリア リサーチ インスティチュート オブ スタンダーズ アンド サイエンス 高分解能ｘ線ロッキングカーブ測定を用いた単結晶ウェーハの面方位測定方法
EP4607183A1 (en) 2024-02-26 2025-08-27 Rigaku Corporation Method, x-ray diffraction system, and program for calculating miscut angle of single-crystal solid sample

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
ELETRONICS *

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102004045145B4 (de) * 2003-10-14 2006-07-06 Rigaku Corp., Akishima Verfahren zur Kristallorientierungsmessung mittels Röntgenstrahlung und Vorrichtung zur Kristallorientierungsmessung mittels Röntgenstrahlung
US7158609B2 (en) 2003-10-14 2007-01-02 Rigaku Corporation X-ray crystal orientation measuring method and X-ray crystal orientation measuring apparatus
CN103257150A (zh) * 2012-08-31 2013-08-21 云南北方驰宏光电有限公司 直接测量晶向偏离角的晶体定向仪及测量方法
JP2016505816A (ja) * 2012-11-16 2016-02-25 コリア リサーチ インスティチュート オブ スタンダーズ アンド サイエンス 高分解能ｘ線ロッキングカーブ測定を用いた単結晶ウェーハの面方位測定方法
US9678023B2 (en) 2012-11-16 2017-06-13 Korea Research Institute Of Standards And Science Method of determining surface orientation of single crystal wafer
EP4607183A1 (en) 2024-02-26 2025-08-27 Rigaku Corporation Method, x-ray diffraction system, and program for calculating miscut angle of single-crystal solid sample

Also Published As

Publication number Publication date
JPH0459581B2 (enrdf_load_stackoverflow) 1992-09-22

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