JPS5713362A - Acceleration detector - Google Patents

Acceleration detector

Info

Publication number
JPS5713362A
JPS5713362A JP8830880A JP8830880A JPS5713362A JP S5713362 A JPS5713362 A JP S5713362A JP 8830880 A JP8830880 A JP 8830880A JP 8830880 A JP8830880 A JP 8830880A JP S5713362 A JPS5713362 A JP S5713362A
Authority
JP
Japan
Prior art keywords
temperature
sensor
oil
diaphragm
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8830880A
Other languages
Japanese (ja)
Inventor
Yukinobu Tsuru
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP8830880A priority Critical patent/JPS5713362A/en
Publication of JPS5713362A publication Critical patent/JPS5713362A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/12—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance
    • G01P15/123—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance by piezo-resistive elements, e.g. semiconductor strain gauges

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)

Abstract

PURPOSE:To prevent the occurrence of a temperature hysteresis, by a method wherein, in an acceleration detector, a semiconductor pressure sensor, consisting of a dispersion strain gauge, and a diaphragm, which seals a temperature compensation circuit of a sensor circuit and an inertia oil and absorbs a volume change due to a change in temperature, are utilized. CONSTITUTION:An oil 14, with which a space, surrounded with a semiconductor pressure detector 18 and a diaphragm 15, is filled, and which produces an inertia weight, is contained in a case 11. A vent hole 2 is formed to absorb a volume change of the oil 14 due to a change in temperature. The pressure detector 18 is provided with a ceramic substrate 16, and a semiconductor pressure sensor 17, whose temperature is compensated by means of the substrate and which detects a stress produced resulting from the accelerating acting on the oil 14, and detects a pressure by means of an amplified signal processing circuit for the signal from the substrate 16 and the sensor 17. The acceleration can be calculated from the pressure. Additionally, a silicon diaphragm and a dispersion strain gauge, of which the sensor 17 consists, are formed into a unitary body, and no temperature hysteresis is created.
JP8830880A 1980-06-27 1980-06-27 Acceleration detector Pending JPS5713362A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8830880A JPS5713362A (en) 1980-06-27 1980-06-27 Acceleration detector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8830880A JPS5713362A (en) 1980-06-27 1980-06-27 Acceleration detector

Publications (1)

Publication Number Publication Date
JPS5713362A true JPS5713362A (en) 1982-01-23

Family

ID=13939297

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8830880A Pending JPS5713362A (en) 1980-06-27 1980-06-27 Acceleration detector

Country Status (1)

Country Link
JP (1) JPS5713362A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59134068U (en) * 1983-02-23 1984-09-07 日本電気ホームエレクトロニクス株式会社 Acceleration sensor
JPS60227904A (en) * 1984-04-27 1985-11-13 Nippon Steel Corp Production of cold rolled stainless steel strip having excellent surface characteristic
JPS626703A (en) * 1985-07-02 1987-01-13 Nippon Steel Corp Production of stainless steel sheet prevented of uneven gloss
DE4436485A1 (en) * 1993-10-13 1995-04-20 Tokai Rika Co Ltd Accelerometer device
EP0694620A1 (en) 1994-07-27 1996-01-31 Kawasaki Steel Corporation Method of producing a stainless steel sheet having excellent brightness

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59134068U (en) * 1983-02-23 1984-09-07 日本電気ホームエレクトロニクス株式会社 Acceleration sensor
JPS60227904A (en) * 1984-04-27 1985-11-13 Nippon Steel Corp Production of cold rolled stainless steel strip having excellent surface characteristic
JPS626703A (en) * 1985-07-02 1987-01-13 Nippon Steel Corp Production of stainless steel sheet prevented of uneven gloss
DE4436485A1 (en) * 1993-10-13 1995-04-20 Tokai Rika Co Ltd Accelerometer device
DE4436485C2 (en) * 1993-10-13 1998-11-19 Tokai Rika Co Ltd Accelerometer device
EP0694620A1 (en) 1994-07-27 1996-01-31 Kawasaki Steel Corporation Method of producing a stainless steel sheet having excellent brightness
US5799527A (en) * 1994-07-27 1998-09-01 Kawasaki Steel Corporation Method of producing a stainless steel sheet having excellent surface brightness

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