JPS55160830A - Pressure measuring device - Google Patents

Pressure measuring device

Info

Publication number
JPS55160830A
JPS55160830A JP6969979A JP6969979A JPS55160830A JP S55160830 A JPS55160830 A JP S55160830A JP 6969979 A JP6969979 A JP 6969979A JP 6969979 A JP6969979 A JP 6969979A JP S55160830 A JPS55160830 A JP S55160830A
Authority
JP
Japan
Prior art keywords
pressure
electrode
measuring
diaphragm
space
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6969979A
Other languages
Japanese (ja)
Other versions
JPS6136610B2 (en
Inventor
Mitsuru Tamai
Takeshi Yasuhara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Electric Co Ltd
Original Assignee
Fuji Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Electric Co Ltd filed Critical Fuji Electric Co Ltd
Priority to JP6969979A priority Critical patent/JPS55160830A/en
Priority to DE19803021477 priority patent/DE3021477A1/en
Publication of JPS55160830A publication Critical patent/JPS55160830A/en
Publication of JPS6136610B2 publication Critical patent/JPS6136610B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L13/00—Devices or apparatus for measuring differences of two or more fluid pressure values
    • G01L13/02—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements
    • G01L13/025—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements using diaphragms

Abstract

PURPOSE: To improve the reliability of the subject device by affording a liquid pressure higher than an atmospheric pressure to a sealed insulating liquid.
CONSTITUTION: The pressure of an insulating liquid sealed in a space between a reference electrode 15 and a pressure receiving diaphragm 53 communicated with each other by way of through holes 31 and 3, a space between an electrode 41 and the reference electrode 15, and a space between an electrode 42 and a measuring diaphragm 52 is set at more than a gage pressure of 25mmHg. By this procedure, the pressure receiving diaphragm 53 deforms by a measuring pressure added to a pressure receiving chamber 83, and the measuring diaphragm 52 is applied with pressure through a sealed insulating oil. The measuring diaphragm 52 deforms by the pressure difference between the same and a reference pressure chamber 82, and the quantity of variation in the capacitor capacitance between the measuring diaphragm 52 and the electrode 42 with respect to the unvariable capacitor capacitance between the reference electrode 15 and the electrode 14. At this time, when the measuring is vacuum, the generation of a gas from the sealed insulating liquid is prevented and the desired object is achieved.
COPYRIGHT: (C)1980,JPO&Japio
JP6969979A 1979-06-04 1979-06-04 Pressure measuring device Granted JPS55160830A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP6969979A JPS55160830A (en) 1979-06-04 1979-06-04 Pressure measuring device
DE19803021477 DE3021477A1 (en) 1979-06-04 1980-06-04 Pressure measurement device with inner chamber - which is sealed on all sides, filled with insulating fluid and contains flat electrode

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6969979A JPS55160830A (en) 1979-06-04 1979-06-04 Pressure measuring device

Publications (2)

Publication Number Publication Date
JPS55160830A true JPS55160830A (en) 1980-12-15
JPS6136610B2 JPS6136610B2 (en) 1986-08-19

Family

ID=13410360

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6969979A Granted JPS55160830A (en) 1979-06-04 1979-06-04 Pressure measuring device

Country Status (2)

Country Link
JP (1) JPS55160830A (en)
DE (1) DE3021477A1 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4572000A (en) * 1983-12-09 1986-02-25 Rosemount Inc. Pressure sensor with a substantially flat overpressure stop for the measuring diaphragm
EP0266446B1 (en) * 1986-11-04 1992-03-11 VEGA Grieshaber GmbH & Co. Capacitive pressure transducer
DE10205822A1 (en) * 2002-02-13 2003-09-04 Soehnle Waagen Gmbh & Co Kg Measuring device for a body analyzer scale

Also Published As

Publication number Publication date
JPS6136610B2 (en) 1986-08-19
DE3021477A1 (en) 1980-12-18

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