JPS54135585A - Electrostatic capacity type measuring apparatus - Google Patents

Abstract

PURPOSE: To measure at high stability in a simple constitution without requiring electronic circuit for zero point shift, by setting the area of electrode at different values depending on the extent of zero point shift.

CONSTITUTION: When a measuring diaphragm 6 to which a standard pressure such as vacuum is applied through a noncompressive liquid displaces depending on the pressure being measured, the distance between the diaphragm 6 and an electrode 30A provided in an insulator 7 of a detecting part 21 changes, and the electrostatic capacity varies in correspondence with the displacement of the diaphragm 6. From this electrostatic capacity and the unchanged electrostatic capacity between a stationary plate 3 and electrode 30 of which area is set at different values depending on the extent of zero point shift of the insulator 7, zero point corrected detection output is generated, so that electronic circuit for zero point shift is not needed. Thus, pressure and other characteristic may be measured at high stability in a simple constitution. Similarly, liquid level may be measured by a diaphragm which is coupled to the load and float.

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