JPS55160831A - Pressure measuring device - Google Patents

Pressure measuring device

Info

Publication number
JPS55160831A
JPS55160831A JP6970079A JP6970079A JPS55160831A JP S55160831 A JPS55160831 A JP S55160831A JP 6970079 A JP6970079 A JP 6970079A JP 6970079 A JP6970079 A JP 6970079A JP S55160831 A JPS55160831 A JP S55160831A
Authority
JP
Japan
Prior art keywords
pressure
diaphragm
sealed liquid
variation
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6970079A
Other languages
Japanese (ja)
Other versions
JPS6138406B2 (en
Inventor
Mitsuru Tamai
Takeshi Yasuhara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Electric Co Ltd
Original Assignee
Fuji Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Electric Co Ltd filed Critical Fuji Electric Co Ltd
Priority to JP6970079A priority Critical patent/JPS55160831A/en
Priority to DE19803021476 priority patent/DE3021476A1/en
Publication of JPS55160831A publication Critical patent/JPS55160831A/en
Publication of JPS6138406B2 publication Critical patent/JPS6138406B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L13/00—Devices or apparatus for measuring differences of two or more fluid pressure values
    • G01L13/02—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements
    • G01L13/025—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements using diaphragms

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)

Abstract

PURPOSE: To improve the temperature characteristic and reliability of the device by adjusting the pressure-capacitance characteristic of a diaphragm.
CONSTITUTION: Pressure-capacitance coefficient of variation at pressure receiving diaphragm 53 ϕmmHg/cc is defined as; ϕ=Ps/V...α (273+to), wherein, reference pressure at a reference pressure chamber 82 is PsmmHg, sealed liquid quantity is Vcc, thermal expansion coefficient of the sealed liquid is α, and the reference temperature to be used it t0°C. As a result, the diaphragm 53 deforms by the measuring pressure applied to the pressure receiving chamber 83, and the measuring diaphragm 52 is applied with pressure through the sealed liquid insulating liquid within the through holes 31 and 3. The measuring diaphragm 52 deforms by the pressure difference between the same and the reference pressure chamber 83, and the quantity of variation in the capacitor capacitance between the measuring diaphragm 52 and the electrode 42 with respect to the unvariable capacitor capacitance between the electrode 15 and the electrode 41. At this time, the variation in the pressure of the sealed liquid and that in the reference pressure upon the fluctuation of the temperature becomes equal, and therefore the desired object is achieved.
COPYRIGHT: (C)1980,JPO&Japio
JP6970079A 1979-06-04 1979-06-04 Pressure measuring device Granted JPS55160831A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP6970079A JPS55160831A (en) 1979-06-04 1979-06-04 Pressure measuring device
DE19803021476 DE3021476A1 (en) 1979-06-04 1980-06-04 Pressure measuring device with temp. compensation - has inner chamber separated from measuring and reference chambers by membranes, one forming variable capacitor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6970079A JPS55160831A (en) 1979-06-04 1979-06-04 Pressure measuring device

Publications (2)

Publication Number Publication Date
JPS55160831A true JPS55160831A (en) 1980-12-15
JPS6138406B2 JPS6138406B2 (en) 1986-08-29

Family

ID=13410387

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6970079A Granted JPS55160831A (en) 1979-06-04 1979-06-04 Pressure measuring device

Country Status (2)

Country Link
JP (1) JPS55160831A (en)
DE (1) DE3021476A1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3634742A1 (en) * 1986-10-11 1988-04-21 Bosch Gmbh Robert PRESSURE SOCKET

Also Published As

Publication number Publication date
DE3021476A1 (en) 1980-12-18
JPS6138406B2 (en) 1986-08-29

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