JPS57132104A - Production of optical thick film waveguide path element - Google Patents
Production of optical thick film waveguide path elementInfo
- Publication number
- JPS57132104A JPS57132104A JP56017782A JP1778281A JPS57132104A JP S57132104 A JPS57132104 A JP S57132104A JP 56017782 A JP56017782 A JP 56017782A JP 1778281 A JP1778281 A JP 1778281A JP S57132104 A JPS57132104 A JP S57132104A
- Authority
- JP
- Japan
- Prior art keywords
- glass
- flat plate
- cylinder
- parent body
- waveguide path
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003287 optical effect Effects 0.000 title 1
- 239000011521 glass Substances 0.000 abstract 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 3
- 238000006243 chemical reaction Methods 0.000 abstract 2
- 239000007792 gaseous phase Substances 0.000 abstract 2
- 239000010410 layer Substances 0.000 abstract 2
- 229910003910 SiCl4 Inorganic materials 0.000 abstract 1
- 238000010521 absorption reaction Methods 0.000 abstract 1
- 239000012159 carrier gas Substances 0.000 abstract 1
- 238000005253 cladding Methods 0.000 abstract 1
- 229910052681 coesite Inorganic materials 0.000 abstract 1
- 239000012792 core layer Substances 0.000 abstract 1
- 229910052906 cristobalite Inorganic materials 0.000 abstract 1
- 239000002737 fuel gas Substances 0.000 abstract 1
- 239000007789 gas Substances 0.000 abstract 1
- 238000010438 heat treatment Methods 0.000 abstract 1
- 230000008018 melting Effects 0.000 abstract 1
- 238000002844 melting Methods 0.000 abstract 1
- 239000012071 phase Substances 0.000 abstract 1
- 239000000843 powder Substances 0.000 abstract 1
- 239000002994 raw material Substances 0.000 abstract 1
- 239000000377 silicon dioxide Substances 0.000 abstract 1
- 235000012239 silicon dioxide Nutrition 0.000 abstract 1
- FDNAPBUWERUEDA-UHFFFAOYSA-N silicon tetrachloride Chemical compound Cl[Si](Cl)(Cl)Cl FDNAPBUWERUEDA-UHFFFAOYSA-N 0.000 abstract 1
- 229910052682 stishovite Inorganic materials 0.000 abstract 1
- 229910052905 tridymite Inorganic materials 0.000 abstract 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B19/00—Other methods of shaping glass
- C03B19/14—Other methods of shaping glass by gas- or vapour- phase reaction processes
- C03B19/1469—Means for changing or stabilising the shape or form of the shaped article or deposit
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B19/00—Other methods of shaping glass
- C03B19/14—Other methods of shaping glass by gas- or vapour- phase reaction processes
- C03B19/1484—Means for supporting, rotating or translating the article being formed
- C03B19/1492—Deposition substrates, e.g. targets
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Optical Integrated Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56017782A JPS57132104A (en) | 1981-02-09 | 1981-02-09 | Production of optical thick film waveguide path element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56017782A JPS57132104A (en) | 1981-02-09 | 1981-02-09 | Production of optical thick film waveguide path element |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57132104A true JPS57132104A (en) | 1982-08-16 |
| JPS6217722B2 JPS6217722B2 (enrdf_load_stackoverflow) | 1987-04-20 |
Family
ID=11953283
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP56017782A Granted JPS57132104A (en) | 1981-02-09 | 1981-02-09 | Production of optical thick film waveguide path element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57132104A (enrdf_load_stackoverflow) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59158121U (ja) * | 1983-04-08 | 1984-10-23 | 古河電気工業株式会社 | 光分岐器 |
| JP2002098851A (ja) * | 2000-09-21 | 2002-04-05 | Sony Corp | 光バス部材の製造方法及び光バス装置 |
| WO2002046113A1 (en) * | 2000-12-08 | 2002-06-13 | University Of Southampton | Fabrication of substrates for planar waveguide devices and planarwaveguide devices |
| WO2008035067A1 (en) * | 2006-09-22 | 2008-03-27 | University Of Southampton | Method of fabricating a planar substrate having optical waveguides |
-
1981
- 1981-02-09 JP JP56017782A patent/JPS57132104A/ja active Granted
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59158121U (ja) * | 1983-04-08 | 1984-10-23 | 古河電気工業株式会社 | 光分岐器 |
| JP2002098851A (ja) * | 2000-09-21 | 2002-04-05 | Sony Corp | 光バス部材の製造方法及び光バス装置 |
| WO2002046113A1 (en) * | 2000-12-08 | 2002-06-13 | University Of Southampton | Fabrication of substrates for planar waveguide devices and planarwaveguide devices |
| WO2008035067A1 (en) * | 2006-09-22 | 2008-03-27 | University Of Southampton | Method of fabricating a planar substrate having optical waveguides |
| US8218933B2 (en) | 2006-09-22 | 2012-07-10 | University Of Southampton | Method of fabricating a planar substrate having optical waveguides |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6217722B2 (enrdf_load_stackoverflow) | 1987-04-20 |
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