JPS57131036A - Light scattering type floating particle counting - Google Patents
Light scattering type floating particle countingInfo
- Publication number
- JPS57131036A JPS57131036A JP56016593A JP1659381A JPS57131036A JP S57131036 A JPS57131036 A JP S57131036A JP 56016593 A JP56016593 A JP 56016593A JP 1659381 A JP1659381 A JP 1659381A JP S57131036 A JPS57131036 A JP S57131036A
- Authority
- JP
- Japan
- Prior art keywords
- sample
- earozol
- particles
- light scattering
- temperature gradient
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000002245 particle Substances 0.000 title abstract 5
- 238000000149 argon plasma sintering Methods 0.000 title 1
- 239000000428 dust Substances 0.000 abstract 2
- 238000010438 heat treatment Methods 0.000 abstract 1
- 238000005259 measurement Methods 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
- G01N15/02—Investigating particle size or size distribution
- G01N15/0205—Investigating particle size or size distribution by optical means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
- G01N15/06—Investigating concentration of particle suspensions
- G01N15/075—Investigating concentration of particle suspensions by optical means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N30/00—Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography or field flow fractionation
Landscapes
- Chemical & Material Sciences (AREA)
- Dispersion Chemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP56016593A JPS57131036A (en) | 1981-02-06 | 1981-02-06 | Light scattering type floating particle counting |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP56016593A JPS57131036A (en) | 1981-02-06 | 1981-02-06 | Light scattering type floating particle counting |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS57131036A true JPS57131036A (en) | 1982-08-13 |
JPH0226176B2 JPH0226176B2 (ja) | 1990-06-07 |
Family
ID=11920570
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP56016593A Granted JPS57131036A (en) | 1981-02-06 | 1981-02-06 | Light scattering type floating particle counting |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57131036A (ja) |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59202044A (ja) * | 1983-05-02 | 1984-11-15 | Dan Sangyo Kk | エアゾル観測用霧箱 |
JPH06241977A (ja) * | 1993-02-15 | 1994-09-02 | Hitachi Ltd | 微粒子計測装置 |
JP2008175590A (ja) * | 2007-01-16 | 2008-07-31 | Tokyo Electron Ltd | パーティクルモニタシステム及び基板処理装置 |
CN107532996A (zh) * | 2015-03-27 | 2018-01-02 | 皇家飞利浦有限公司 | 借助热泳来保护光学颗粒传感器免受颗粒沉积 |
WO2018234408A1 (en) | 2017-06-21 | 2018-12-27 | Koninklijke Philips N.V. | PARTICLE SENSOR AND METHOD FOR DETECTING PARTICLES |
EP3444587A1 (en) * | 2017-08-14 | 2019-02-20 | Koninklijke Philips N.V. | Particle sensor and particle sensing method |
EP3874078A4 (en) * | 2017-11-14 | 2022-10-12 | Aerodyne Microsystems Inc., A Delaware Corporation | THERMOPHORETIC PARTICLE DETECTION SYSTEM WITH VARIABLE DUCT GEOMETRY |
-
1981
- 1981-02-06 JP JP56016593A patent/JPS57131036A/ja active Granted
Cited By (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59202044A (ja) * | 1983-05-02 | 1984-11-15 | Dan Sangyo Kk | エアゾル観測用霧箱 |
JPH06241977A (ja) * | 1993-02-15 | 1994-09-02 | Hitachi Ltd | 微粒子計測装置 |
JP2008175590A (ja) * | 2007-01-16 | 2008-07-31 | Tokyo Electron Ltd | パーティクルモニタシステム及び基板処理装置 |
CN107532996A (zh) * | 2015-03-27 | 2018-01-02 | 皇家飞利浦有限公司 | 借助热泳来保护光学颗粒传感器免受颗粒沉积 |
JP2018512563A (ja) * | 2015-03-27 | 2018-05-17 | コーニンクレッカ フィリップス エヌ ヴェKoninklijke Philips N.V. | センサデバイス及び方法 |
EP3274071B1 (en) * | 2015-03-27 | 2023-05-24 | Koninklijke Philips N.V. | Protecting an optical particle sensor from particulate deposits by thermophoresis |
CN107532996B (zh) * | 2015-03-27 | 2020-09-01 | 皇家飞利浦有限公司 | 借助热泳来保护光学颗粒传感器免受颗粒沉积 |
US10363514B2 (en) | 2015-03-27 | 2019-07-30 | Koninklijke Philips N.V. | Protecting an optical particle sensor from particulate desposits by thermophoresis |
JP2020523601A (ja) * | 2017-06-21 | 2020-08-06 | コーニンクレッカ フィリップス エヌ ヴェKoninklijke Philips N.V. | 粒子センサ及び粒子感知方法 |
CN110785645A (zh) * | 2017-06-21 | 2020-02-11 | 皇家飞利浦有限公司 | 颗粒传感器和颗粒感测方法 |
US10816445B2 (en) | 2017-06-21 | 2020-10-27 | Koninklijke Philips N.V. | Particle sensor and particle sensing method |
CN110785645B (zh) * | 2017-06-21 | 2022-04-08 | 皇家飞利浦有限公司 | 颗粒传感器和颗粒感测方法 |
WO2018234408A1 (en) | 2017-06-21 | 2018-12-27 | Koninklijke Philips N.V. | PARTICLE SENSOR AND METHOD FOR DETECTING PARTICLES |
EP3444587A1 (en) * | 2017-08-14 | 2019-02-20 | Koninklijke Philips N.V. | Particle sensor and particle sensing method |
EP3874078A4 (en) * | 2017-11-14 | 2022-10-12 | Aerodyne Microsystems Inc., A Delaware Corporation | THERMOPHORETIC PARTICLE DETECTION SYSTEM WITH VARIABLE DUCT GEOMETRY |
Also Published As
Publication number | Publication date |
---|---|
JPH0226176B2 (ja) | 1990-06-07 |
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