JPS57130435A - Annealing method of matter by light beam - Google Patents

Annealing method of matter by light beam

Info

Publication number
JPS57130435A
JPS57130435A JP56016544A JP1654481A JPS57130435A JP S57130435 A JPS57130435 A JP S57130435A JP 56016544 A JP56016544 A JP 56016544A JP 1654481 A JP1654481 A JP 1654481A JP S57130435 A JPS57130435 A JP S57130435A
Authority
JP
Japan
Prior art keywords
matter
vessel
film
scarcely
irradiate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56016544A
Other languages
English (en)
Japanese (ja)
Other versions
JPS628011B2 (enExample
Inventor
Yoichi Akasaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP56016544A priority Critical patent/JPS57130435A/ja
Publication of JPS57130435A publication Critical patent/JPS57130435A/ja
Publication of JPS628011B2 publication Critical patent/JPS628011B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P34/42—

Landscapes

  • Recrystallisation Techniques (AREA)
JP56016544A 1981-02-05 1981-02-05 Annealing method of matter by light beam Granted JPS57130435A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56016544A JPS57130435A (en) 1981-02-05 1981-02-05 Annealing method of matter by light beam

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56016544A JPS57130435A (en) 1981-02-05 1981-02-05 Annealing method of matter by light beam

Publications (2)

Publication Number Publication Date
JPS57130435A true JPS57130435A (en) 1982-08-12
JPS628011B2 JPS628011B2 (enExample) 1987-02-20

Family

ID=11919200

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56016544A Granted JPS57130435A (en) 1981-02-05 1981-02-05 Annealing method of matter by light beam

Country Status (1)

Country Link
JP (1) JPS57130435A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62149881A (ja) * 1985-12-24 1987-07-03 Canon Inc 堆積膜形成装置

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02130708U (enExample) * 1989-03-31 1990-10-29
JPH0340007U (enExample) * 1989-08-28 1991-04-17
JP5326183B2 (ja) * 2005-10-14 2013-10-30 澁谷工業株式会社 レーザアニール方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62149881A (ja) * 1985-12-24 1987-07-03 Canon Inc 堆積膜形成装置

Also Published As

Publication number Publication date
JPS628011B2 (enExample) 1987-02-20

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