JPS57128024A - Single crystallization for non-single crystalline semiconductor layer - Google Patents
Single crystallization for non-single crystalline semiconductor layerInfo
- Publication number
- JPS57128024A JPS57128024A JP1254981A JP1254981A JPS57128024A JP S57128024 A JPS57128024 A JP S57128024A JP 1254981 A JP1254981 A JP 1254981A JP 1254981 A JP1254981 A JP 1254981A JP S57128024 A JPS57128024 A JP S57128024A
- Authority
- JP
- Japan
- Prior art keywords
- scanned
- scanning
- region
- crystal
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02656—Special treatments
- H01L21/02664—Aftertreatments
- H01L21/02667—Crystallisation or recrystallisation of non-monocrystalline semiconductor materials, e.g. regrowth
- H01L21/02675—Crystallisation or recrystallisation of non-monocrystalline semiconductor materials, e.g. regrowth using laser beams
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02656—Special treatments
- H01L21/02664—Aftertreatments
- H01L21/02667—Crystallisation or recrystallisation of non-monocrystalline semiconductor materials, e.g. regrowth
- H01L21/02691—Scanning of a beam
Abstract
PURPOSE:To efficiently single-crystallize a non-signal crystalline layer by partly superposing a region to be scanned on the previously scanned region after the second scanning, thereby increasing the area of the single crystal obtained by the first scanning. CONSTITUTION:When a laser beam 15 is scanned, a substrate is solidified from the center upon movement of the beam 15. A line 17 represents a boundary line between a solid phase and a liquid phase so that the right side is solid and the left side is liquid. Since the center grows in accordance with the planar orientation of the crystal of the substrate contacted via a hole 3, it becomes a single crystal. Then, a rectangular laser beam 15' having an intensity gradually increasing from the region scanned by the first scanning an oblique intensity distribution abruptly decreasing at the opposite side is scanned as the second scanning from the start point of a hole 3 over a polycrystal 16b to be superposed on a single crystalline layer 16. Since the substrate is solidified, as shown by a boundary line 17', from the previously scanned region side in this manner, the crystal is grown in accordance with both orientations of the single crystal layer 16, a single crystalline layer 16' is thus formed, and the polycrystalline layer is formed at the lower side.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1254981A JPS57128024A (en) | 1981-01-30 | 1981-01-30 | Single crystallization for non-single crystalline semiconductor layer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1254981A JPS57128024A (en) | 1981-01-30 | 1981-01-30 | Single crystallization for non-single crystalline semiconductor layer |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS57128024A true JPS57128024A (en) | 1982-08-09 |
JPS6329819B2 JPS6329819B2 (en) | 1988-06-15 |
Family
ID=11808407
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1254981A Granted JPS57128024A (en) | 1981-01-30 | 1981-01-30 | Single crystallization for non-single crystalline semiconductor layer |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57128024A (en) |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59119824A (en) * | 1982-12-27 | 1984-07-11 | Fujitsu Ltd | Manufacture of semiconductor device |
JPS59224121A (en) * | 1983-06-03 | 1984-12-17 | Agency Of Ind Science & Technol | Laser annealing device |
JPS6076117A (en) * | 1983-09-30 | 1985-04-30 | Sony Corp | Method for crystallization of semiconductor thin film |
JPS60126840A (en) * | 1983-12-13 | 1985-07-06 | Matsushita Electric Ind Co Ltd | Laser beam irradiation device |
JPS60189216A (en) * | 1984-03-08 | 1985-09-26 | Agency Of Ind Science & Technol | Laser annealing equipment |
JPS62145718A (en) * | 1985-12-20 | 1987-06-29 | Agency Of Ind Science & Technol | Manufacture of single crystal semiconductor layer |
JPS62216318A (en) * | 1986-03-18 | 1987-09-22 | Fujitsu Ltd | Laser annealing apparatus |
JPH01246829A (en) * | 1988-03-28 | 1989-10-02 | Tokyo Electron Ltd | Beam annealing device |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02128314U (en) * | 1989-03-29 | 1990-10-23 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS52115681A (en) * | 1975-12-10 | 1977-09-28 | Shii Shii Fuan Jiyon | Method of improving crystallinity of semiconductor coating by scanning laser beam |
-
1981
- 1981-01-30 JP JP1254981A patent/JPS57128024A/en active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS52115681A (en) * | 1975-12-10 | 1977-09-28 | Shii Shii Fuan Jiyon | Method of improving crystallinity of semiconductor coating by scanning laser beam |
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59119824A (en) * | 1982-12-27 | 1984-07-11 | Fujitsu Ltd | Manufacture of semiconductor device |
JPS59224121A (en) * | 1983-06-03 | 1984-12-17 | Agency Of Ind Science & Technol | Laser annealing device |
JPS6076117A (en) * | 1983-09-30 | 1985-04-30 | Sony Corp | Method for crystallization of semiconductor thin film |
JPS60126840A (en) * | 1983-12-13 | 1985-07-06 | Matsushita Electric Ind Co Ltd | Laser beam irradiation device |
JPH0220137B2 (en) * | 1983-12-13 | 1990-05-08 | Matsushita Electric Ind Co Ltd | |
JPS60189216A (en) * | 1984-03-08 | 1985-09-26 | Agency Of Ind Science & Technol | Laser annealing equipment |
JPS62145718A (en) * | 1985-12-20 | 1987-06-29 | Agency Of Ind Science & Technol | Manufacture of single crystal semiconductor layer |
JPS62216318A (en) * | 1986-03-18 | 1987-09-22 | Fujitsu Ltd | Laser annealing apparatus |
JPH01246829A (en) * | 1988-03-28 | 1989-10-02 | Tokyo Electron Ltd | Beam annealing device |
Also Published As
Publication number | Publication date |
---|---|
JPS6329819B2 (en) | 1988-06-15 |
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