JPS5711833A - Preparation of thin oxide magnetic film - Google Patents
Preparation of thin oxide magnetic filmInfo
- Publication number
- JPS5711833A JPS5711833A JP8617780A JP8617780A JPS5711833A JP S5711833 A JPS5711833 A JP S5711833A JP 8617780 A JP8617780 A JP 8617780A JP 8617780 A JP8617780 A JP 8617780A JP S5711833 A JPS5711833 A JP S5711833A
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- reducing
- fume
- evaporated
- resultant
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010409 thin film Substances 0.000 abstract 8
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 abstract 4
- 239000003517 fume Substances 0.000 abstract 3
- 230000001590 oxidative effect Effects 0.000 abstract 3
- 239000000758 substrate Substances 0.000 abstract 3
- SZVJSHCCFOBDDC-UHFFFAOYSA-N ferrosoferric oxide Chemical compound O=[Fe]O[Fe]O[Fe]=O SZVJSHCCFOBDDC-UHFFFAOYSA-N 0.000 abstract 2
- 239000007789 gas Substances 0.000 abstract 2
- 238000010438 heat treatment Methods 0.000 abstract 2
- 229910052742 iron Inorganic materials 0.000 abstract 2
- 229910006297 γ-Fe2O3 Inorganic materials 0.000 abstract 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 abstract 1
- 229910021578 Iron(III) chloride Inorganic materials 0.000 abstract 1
- 238000007664 blowing Methods 0.000 abstract 1
- 239000010408 film Substances 0.000 abstract 1
- FBAFATDZDUQKNH-UHFFFAOYSA-M iron chloride Chemical compound [Cl-].[Fe] FBAFATDZDUQKNH-UHFFFAOYSA-M 0.000 abstract 1
- RBTARNINKXHZNM-UHFFFAOYSA-K iron trichloride Chemical compound Cl[Fe](Cl)Cl RBTARNINKXHZNM-UHFFFAOYSA-K 0.000 abstract 1
- 229910003145 α-Fe2O3 Inorganic materials 0.000 abstract 1
Landscapes
- Compounds Of Iron (AREA)
- Chemical Vapour Deposition (AREA)
- Thin Magnetic Films (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8617780A JPS5711833A (en) | 1980-06-25 | 1980-06-25 | Preparation of thin oxide magnetic film |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8617780A JPS5711833A (en) | 1980-06-25 | 1980-06-25 | Preparation of thin oxide magnetic film |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5711833A true JPS5711833A (en) | 1982-01-21 |
| JPS646529B2 JPS646529B2 (enrdf_load_stackoverflow) | 1989-02-03 |
Family
ID=13879470
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8617780A Granted JPS5711833A (en) | 1980-06-25 | 1980-06-25 | Preparation of thin oxide magnetic film |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5711833A (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06235660A (ja) * | 1993-02-10 | 1994-08-23 | Nec Corp | 分光分析装置 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5265898A (en) * | 1975-11-26 | 1977-05-31 | Nippon Telegr & Teleph Corp <Ntt> | Preparing oxidized magnetic thin film |
-
1980
- 1980-06-25 JP JP8617780A patent/JPS5711833A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5265898A (en) * | 1975-11-26 | 1977-05-31 | Nippon Telegr & Teleph Corp <Ntt> | Preparing oxidized magnetic thin film |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS646529B2 (enrdf_load_stackoverflow) | 1989-02-03 |
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