JPS57110913A - Measurement of curved surface - Google Patents

Measurement of curved surface

Info

Publication number
JPS57110913A
JPS57110913A JP18908880A JP18908880A JPS57110913A JP S57110913 A JPS57110913 A JP S57110913A JP 18908880 A JP18908880 A JP 18908880A JP 18908880 A JP18908880 A JP 18908880A JP S57110913 A JPS57110913 A JP S57110913A
Authority
JP
Japan
Prior art keywords
measured
product
memorized
curved surface
measurement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18908880A
Other languages
English (en)
Inventor
Kazuo Azuma
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toyota Motor Corp
Original Assignee
Toyota Motor Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyota Motor Corp filed Critical Toyota Motor Corp
Priority to JP18908880A priority Critical patent/JPS57110913A/ja
Publication of JPS57110913A publication Critical patent/JPS57110913A/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/20—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring contours or curvatures, e.g. determining profile

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
JP18908880A 1980-12-27 1980-12-27 Measurement of curved surface Pending JPS57110913A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18908880A JPS57110913A (en) 1980-12-27 1980-12-27 Measurement of curved surface

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18908880A JPS57110913A (en) 1980-12-27 1980-12-27 Measurement of curved surface

Publications (1)

Publication Number Publication Date
JPS57110913A true JPS57110913A (en) 1982-07-10

Family

ID=16235117

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18908880A Pending JPS57110913A (en) 1980-12-27 1980-12-27 Measurement of curved surface

Country Status (1)

Country Link
JP (1) JPS57110913A (ja)

Cited By (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6044801A (ja) * 1983-08-23 1985-03-11 Fujitsu Ltd アンテナ鏡面測定装置とその測定方法
JPS60165805U (ja) * 1984-04-11 1985-11-02 株式会社ミツトヨ 三次元測定機の操作盤
JPS61124816A (ja) * 1984-11-22 1986-06-12 Hitachi Ltd 非接触式三次元計測装置
JPS6283609A (ja) * 1985-10-09 1987-04-17 Yaskawa Electric Mfg Co Ltd 軌跡アナライザ
JPS62142209A (ja) * 1985-12-17 1987-06-25 Nakayama Seikosho:Kk 輪廓形状比較装置
JPS62168007A (ja) * 1986-01-20 1987-07-24 Nachi Fujikoshi Corp 形状認識装置
JPS62276405A (ja) * 1986-03-04 1987-12-01 ランク・テイラ−・ホブソン・リミテツド 測定装置
JPS63106514A (ja) * 1986-07-25 1988-05-11 レニシヨウ　パブリツク　リミテツド　カンパニ− 物品検査方法および装置
JPS6390111U (ja) * 1986-12-01 1988-06-11
JPS6454305A (en) * 1987-08-26 1989-03-01 Nec Corp Method and device for pattern size measurement
JPH0197207U (ja) * 1987-12-21 1989-06-28
WO1993004339A1 (en) * 1991-08-27 1993-03-04 Fanuc Ltd Method of diagnosing real time sensor
JPH06194139A (ja) * 1992-10-15 1994-07-15 Mitsutoyo Corp 形状測定方法
USRE37740E1 (en) 1988-02-19 2002-06-11 Kla-Tencor Corporation Method and apparatus for optical inspection of substrates
JP2009536332A (ja) * 2006-05-08 2009-10-08 テイラー・ホブソン・リミテッド 表面特性を測定するための測定器
CN107121113A (zh) * 2017-04-24 2017-09-01 上海现代先进超精密制造中心有限公司 基于三坐标的大口径、复杂自由曲面元件的检测方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50130474A (ja) * 1974-04-03 1975-10-15
JPS5355059A (en) * 1976-10-27 1978-05-19 Mitsutoyo Seisakusho Multiidirectional measuring method

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50130474A (ja) * 1974-04-03 1975-10-15
JPS5355059A (en) * 1976-10-27 1978-05-19 Mitsutoyo Seisakusho Multiidirectional measuring method

Cited By (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6044801A (ja) * 1983-08-23 1985-03-11 Fujitsu Ltd アンテナ鏡面測定装置とその測定方法
JPS60165805U (ja) * 1984-04-11 1985-11-02 株式会社ミツトヨ 三次元測定機の操作盤
JPS61124816A (ja) * 1984-11-22 1986-06-12 Hitachi Ltd 非接触式三次元計測装置
JPS6283609A (ja) * 1985-10-09 1987-04-17 Yaskawa Electric Mfg Co Ltd 軌跡アナライザ
JPS62142209A (ja) * 1985-12-17 1987-06-25 Nakayama Seikosho:Kk 輪廓形状比較装置
JPS62168007A (ja) * 1986-01-20 1987-07-24 Nachi Fujikoshi Corp 形状認識装置
JPS62276405A (ja) * 1986-03-04 1987-12-01 ランク・テイラ−・ホブソン・リミテツド 測定装置
JPH0648186B2 (ja) * 1986-03-04 1994-06-22 ランク・テイラ−・ホブソン・リミテツド 測定装置
JPS63106514A (ja) * 1986-07-25 1988-05-11 レニシヨウ　パブリツク　リミテツド　カンパニ− 物品検査方法および装置
JPH059608Y2 (ja) * 1986-12-01 1993-03-10
JPS6390111U (ja) * 1986-12-01 1988-06-11
JPS6454305A (en) * 1987-08-26 1989-03-01 Nec Corp Method and device for pattern size measurement
JPH0197207U (ja) * 1987-12-21 1989-06-28
JPH0547367Y2 (ja) * 1987-12-21 1993-12-14
USRE37740E1 (en) 1988-02-19 2002-06-11 Kla-Tencor Corporation Method and apparatus for optical inspection of substrates
WO1993004339A1 (en) * 1991-08-27 1993-03-04 Fanuc Ltd Method of diagnosing real time sensor
US5511007A (en) * 1991-08-27 1996-04-23 Fanuc Ltd. Diagnostic method for a real time sensor mounted on a robot
JPH06194139A (ja) * 1992-10-15 1994-07-15 Mitsutoyo Corp 形状測定方法
JP2009536332A (ja) * 2006-05-08 2009-10-08 テイラー・ホブソン・リミテッド 表面特性を測定するための測定器
CN107121113A (zh) * 2017-04-24 2017-09-01 上海现代先进超精密制造中心有限公司 基于三坐标的大口径、复杂自由曲面元件的检测方法

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