JPS6454305A - Method and device for pattern size measurement - Google Patents
Method and device for pattern size measurementInfo
- Publication number
- JPS6454305A JPS6454305A JP62213398A JP21339887A JPS6454305A JP S6454305 A JPS6454305 A JP S6454305A JP 62213398 A JP62213398 A JP 62213398A JP 21339887 A JP21339887 A JP 21339887A JP S6454305 A JPS6454305 A JP S6454305A
- Authority
- JP
- Japan
- Prior art keywords
- data
- measuring instrument
- length measuring
- measurement
- cad
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
- Tests Of Electronic Circuits (AREA)
Abstract
PURPOSE:To facilitate and automate the handling of data by finding out a pattern to be measured from a high-density pattern formed on a wafer, and projecting a primary beam only on the part and measuring the pattern size. CONSTITUTION:A converting device 102 which inputs output data 101 from a CAD as MT converts the data 101 into the format of data which is easily processed by an electron beam length measuring instrument 105. Then a measurement schedule data generating device 103 which determines a measurement map, a register mark position, etc., in a wafer sends generated schedule data to a controller 104 and the electron beam length measuring instrument 105 starts measurement. Here, the length measuring instrument 105 is a stage with a laser interferometer and capable of high-accuracy positioning, so a position specified with the CAD data is found with + or -0.1mum accuracy.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62213398A JPS6454305A (en) | 1987-08-26 | 1987-08-26 | Method and device for pattern size measurement |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62213398A JPS6454305A (en) | 1987-08-26 | 1987-08-26 | Method and device for pattern size measurement |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6454305A true JPS6454305A (en) | 1989-03-01 |
Family
ID=16638551
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62213398A Pending JPS6454305A (en) | 1987-08-26 | 1987-08-26 | Method and device for pattern size measurement |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6454305A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001304839A (en) * | 2000-04-25 | 2001-10-31 | Advantest Corp | Electron beam length measuring apparatus and length measuring method |
JP2002328015A (en) * | 2001-04-27 | 2002-11-15 | Hitachi Ltd | Semiconductor test system |
WO2007102421A1 (en) * | 2006-03-06 | 2007-09-13 | Advantest Corporation | Pattern inspecting system and pattern inspecting method |
JP2010085419A (en) * | 2010-01-22 | 2010-04-15 | Advantest Corp | Device and method for measuring electron beam length |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS50130474A (en) * | 1974-04-03 | 1975-10-15 | ||
JPS57110913A (en) * | 1980-12-27 | 1982-07-10 | Toyota Motor Corp | Measurement of curved surface |
JPS6027809A (en) * | 1983-07-25 | 1985-02-12 | Toyota Motor Corp | Method for measuring shape of surface |
JPS61114121A (en) * | 1984-11-08 | 1986-05-31 | Toyota Motor Corp | Method and device for size measurement |
JPS61124816A (en) * | 1984-11-22 | 1986-06-12 | Hitachi Ltd | Non-contact type three-dimensional measuring apparatus |
-
1987
- 1987-08-26 JP JP62213398A patent/JPS6454305A/en active Pending
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS50130474A (en) * | 1974-04-03 | 1975-10-15 | ||
JPS57110913A (en) * | 1980-12-27 | 1982-07-10 | Toyota Motor Corp | Measurement of curved surface |
JPS6027809A (en) * | 1983-07-25 | 1985-02-12 | Toyota Motor Corp | Method for measuring shape of surface |
JPS61114121A (en) * | 1984-11-08 | 1986-05-31 | Toyota Motor Corp | Method and device for size measurement |
JPS61124816A (en) * | 1984-11-22 | 1986-06-12 | Hitachi Ltd | Non-contact type three-dimensional measuring apparatus |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001304839A (en) * | 2000-04-25 | 2001-10-31 | Advantest Corp | Electron beam length measuring apparatus and length measuring method |
JP2002328015A (en) * | 2001-04-27 | 2002-11-15 | Hitachi Ltd | Semiconductor test system |
WO2007102421A1 (en) * | 2006-03-06 | 2007-09-13 | Advantest Corporation | Pattern inspecting system and pattern inspecting method |
JP2010085419A (en) * | 2010-01-22 | 2010-04-15 | Advantest Corp | Device and method for measuring electron beam length |
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