JPS6431012A - Measuring apparatus of shape of surface - Google Patents
Measuring apparatus of shape of surfaceInfo
- Publication number
- JPS6431012A JPS6431012A JP18701687A JP18701687A JPS6431012A JP S6431012 A JPS6431012 A JP S6431012A JP 18701687 A JP18701687 A JP 18701687A JP 18701687 A JP18701687 A JP 18701687A JP S6431012 A JPS6431012 A JP S6431012A
- Authority
- JP
- Japan
- Prior art keywords
- measured
- cpu
- numerical value
- measurement
- output
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE:To obtain a numerical value and an image output being accurate and to improve operability, by a method wherein the state of the surface of an object to be measured, which is disposed on an X-Y table, is measured continuously by means of a laser light distance measuring apparatus. CONSTITUTION:A distance (h) between an object 3 to be measured on an X-Y table 17 and a laser head 1 is measured by a measuring unit 2, and an analog output thereof is subjected to digital conversion in an A/D converter 7 and then inputted to CPU 8. CPU 8 generates a required numerical value output by computation and displays same in CRT 10. Moreover, pulse motors 15 and 16 are driven to move a table 17 by the generated signal. This movement of the table 17 and the processing of the result of measurement by CPU are conducted continuously for a required period, and the result is printed by a printer 9 as occasion demands. Accordingly, the accurate numerical value output can be obtained inexpensively relatively, and also the measurement of the shape of a surface can be performed with excellent operability.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18701687A JPS6431012A (en) | 1987-07-27 | 1987-07-27 | Measuring apparatus of shape of surface |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18701687A JPS6431012A (en) | 1987-07-27 | 1987-07-27 | Measuring apparatus of shape of surface |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6431012A true JPS6431012A (en) | 1989-02-01 |
Family
ID=16198724
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18701687A Pending JPS6431012A (en) | 1987-07-27 | 1987-07-27 | Measuring apparatus of shape of surface |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6431012A (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0959235A2 (en) | 1998-05-20 | 1999-11-24 | Hitachi, Ltd. | Gas turbine power plant |
| US6578354B2 (en) | 2000-01-21 | 2003-06-17 | Hitachi, Ltd. | Gas turbine electric power generation equipment and air humidifier |
| US6644013B1 (en) | 1998-10-23 | 2003-11-11 | Hitachi, Ltd. | Gas turbine power generation equipment and air humidifying apparatus |
| US6718750B2 (en) | 2001-07-26 | 2004-04-13 | Hitachi, Ltd. | Gas turbine installation with regenerator and water injection |
| US7082749B2 (en) | 2000-01-21 | 2006-08-01 | Hitachi, Ltd. | Gas turbine electric power generation equipment and air humidifier |
| US7251926B2 (en) | 2001-07-26 | 2007-08-07 | Hitachi, Ltd. | Gas turbine installation |
-
1987
- 1987-07-27 JP JP18701687A patent/JPS6431012A/en active Pending
Cited By (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6247302B1 (en) | 1998-05-20 | 2001-06-19 | Hitachi, Ltd. | Gas turbine power plant |
| US6397578B2 (en) | 1998-05-20 | 2002-06-04 | Hitachi, Ltd. | Gas turbine power plant |
| EP0959235A2 (en) | 1998-05-20 | 1999-11-24 | Hitachi, Ltd. | Gas turbine power plant |
| US6901736B2 (en) | 1998-10-23 | 2005-06-07 | Hitachi, Ltd. | Gas turbine electric power generation equipment and air humidifier |
| US6644013B1 (en) | 1998-10-23 | 2003-11-11 | Hitachi, Ltd. | Gas turbine power generation equipment and air humidifying apparatus |
| EP1637713A2 (en) | 1998-10-23 | 2006-03-22 | Hitachi, Ltd. | Gas turbine electric power generation equipment |
| US7082749B2 (en) | 2000-01-21 | 2006-08-01 | Hitachi, Ltd. | Gas turbine electric power generation equipment and air humidifier |
| US6578354B2 (en) | 2000-01-21 | 2003-06-17 | Hitachi, Ltd. | Gas turbine electric power generation equipment and air humidifier |
| US7096659B1 (en) | 2000-01-21 | 2006-08-29 | Hitachi, Ltd. | Gas turbine electric power generation equipment and air humidifier |
| US6772596B2 (en) | 2001-07-26 | 2004-08-10 | Hitachi, Ltd. | Gas turbine installation |
| US6718750B2 (en) | 2001-07-26 | 2004-04-13 | Hitachi, Ltd. | Gas turbine installation with regenerator and water injection |
| US7082748B2 (en) | 2001-07-26 | 2006-08-01 | Hitachi, Ltd. | Gas turbine installation |
| US7100359B2 (en) | 2001-07-26 | 2006-09-05 | Hitachi, Ltd. | Gas turbine installation |
| US7251926B2 (en) | 2001-07-26 | 2007-08-07 | Hitachi, Ltd. | Gas turbine installation |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS6472173A (en) | Apparatus for operating working element with respect to moving substrate | |
| ZA893206B (en) | Method and apparatus for conducting electrochemiluminescence measurements | |
| JPS6431012A (en) | Measuring apparatus of shape of surface | |
| US4745280A (en) | Apparatus for measuring the profile of a laser beam | |
| JPS5771756A (en) | Digital display device for feeding amount of machine tool and the like | |
| JPS6459162A (en) | Cross coil type mobile magnet instrument | |
| JPS6443711A (en) | Surface strain measuring instrument | |
| DK0490375T3 (en) | Multi-axis multi-uP-NC control for machine tools | |
| JPS562527A (en) | Mtf measuring instrument | |
| JPS55164303A (en) | Measuring method for deformation of vehicle body | |
| JPS5583803A (en) | Dimension measuring unit | |
| JPS55137858A (en) | Automatic measuring compensator for machine tool | |
| JPS5430880A (en) | Minute vibration measuring apparatus | |
| JPS6454305A (en) | Method and device for pattern size measurement | |
| JPS55137768A (en) | Facsimile unit | |
| JPS53100269A (en) | Position measuring apparatus | |
| JPS6426103A (en) | Optical type two-directional length measuring instrument | |
| JPS6472208A (en) | Conversion system between robot coordinate and visual coordinate | |
| JPS5770212A (en) | Measuring device for profile of heap of charge in blast furnace | |
| JPS57114807A (en) | Microdistance measuring device using electron beam | |
| JPS54104766A (en) | A-d converter | |
| JPS5444818A (en) | Measuring instrument for pickup dimensions | |
| SU647621A1 (en) | Pulse signal parameter measuring arrangement | |
| JPS5664610A (en) | Measuring method of tooth form of gear | |
| JPH09155501A (en) | Dimension measuring instrument for simple transportable mold and its associated parts |