JPS56125608A - Noncontact measuring device - Google Patents

Noncontact measuring device

Info

Publication number
JPS56125608A
JPS56125608A JP2865580A JP2865580A JPS56125608A JP S56125608 A JPS56125608 A JP S56125608A JP 2865580 A JP2865580 A JP 2865580A JP 2865580 A JP2865580 A JP 2865580A JP S56125608 A JPS56125608 A JP S56125608A
Authority
JP
Japan
Prior art keywords
computer
optical
taken
measuring device
optical sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2865580A
Other languages
Japanese (ja)
Inventor
Masahide Hamaya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2865580A priority Critical patent/JPS56125608A/en
Publication of JPS56125608A publication Critical patent/JPS56125608A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures

Abstract

PURPOSE:To realize a highly accurate three-dimensional measuring device by properly using an optical system, or an electrical system or fluid depending upon respective materials of the counterpart. CONSTITUTION:An optical probe OP and an optical sensor OS are made in one body, and the distance from an object to be measured is measured up to near a fixed distance by the optical sensor OS. The signal to the effect of approaching from the optical sensor OS is taken into a computer 7. From the computer 7, the operation of the optical probe OP is commanded. The signal from the optical probe OP is taken into the computer 7. In this way, the positions of the unit at a fixed distance from the surface of the object are all taken into the computer 7. From these data, the shape, size, etc. of the object are program-processed, and the results thereof are displayed respectively in a printer 8, an XY plotter 9, and a CRT display 10.
JP2865580A 1980-03-06 1980-03-06 Noncontact measuring device Pending JPS56125608A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2865580A JPS56125608A (en) 1980-03-06 1980-03-06 Noncontact measuring device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2865580A JPS56125608A (en) 1980-03-06 1980-03-06 Noncontact measuring device

Publications (1)

Publication Number Publication Date
JPS56125608A true JPS56125608A (en) 1981-10-02

Family

ID=12254515

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2865580A Pending JPS56125608A (en) 1980-03-06 1980-03-06 Noncontact measuring device

Country Status (1)

Country Link
JP (1) JPS56125608A (en)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5890102A (en) * 1981-11-25 1983-05-28 Mitsutoyo Mfg Co Ltd Measurement apparatus
JPS5890103A (en) * 1981-11-25 1983-05-28 Mitsutoyo Mfg Co Ltd Measurement apparatus
JPS58106401A (en) * 1981-12-16 1983-06-24 マウゼル−ベルケ・オベルンドルフ・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツング Device for measuring coordinate
JPS5979110A (en) * 1982-09-20 1984-05-08 メセルトロン・ソシエテ・アノニム Measuring method for inspection of accuracy of machine tool and device for executing said method
JPS6086407A (en) * 1983-10-18 1985-05-16 Agency Of Ind Science & Technol Analyzer for three-dimensional movement
JPS612008A (en) * 1984-06-15 1986-01-08 Mitsutoyo Mfg Co Ltd Coordinate measuring instrument
WO1986004407A1 (en) * 1985-01-22 1986-07-31 Mitutoyo Mfg. Co., Ltd. Multi-dimensional measuring instrument
JPS63238509A (en) * 1987-03-27 1988-10-04 Miyano:Kk Length measuring instrument with laser
KR100481808B1 (en) * 2002-04-12 2005-04-11 한국기계연구원 A untouchable type apparatus for measuring a gear

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5890103A (en) * 1981-11-25 1983-05-28 Mitsutoyo Mfg Co Ltd Measurement apparatus
JPS5890102A (en) * 1981-11-25 1983-05-28 Mitsutoyo Mfg Co Ltd Measurement apparatus
JPS635684B2 (en) * 1981-11-25 1988-02-04 Mitsutoyo Kk
JPS58106401A (en) * 1981-12-16 1983-06-24 マウゼル−ベルケ・オベルンドルフ・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツング Device for measuring coordinate
JPH0322922B2 (en) * 1982-09-20 1991-03-27 Meseltron Sa
JPS5979110A (en) * 1982-09-20 1984-05-08 メセルトロン・ソシエテ・アノニム Measuring method for inspection of accuracy of machine tool and device for executing said method
JPS6086407A (en) * 1983-10-18 1985-05-16 Agency Of Ind Science & Technol Analyzer for three-dimensional movement
JPS612008A (en) * 1984-06-15 1986-01-08 Mitsutoyo Mfg Co Ltd Coordinate measuring instrument
WO1986004407A1 (en) * 1985-01-22 1986-07-31 Mitutoyo Mfg. Co., Ltd. Multi-dimensional measuring instrument
US4727653A (en) * 1985-01-22 1988-03-01 Mitutoyo Mfg. Co., Ltd. Coordinate measuring instrument
US5191717A (en) * 1985-01-22 1993-03-09 Mitutoyo Mfg. Co., Ltd. Coordinate measuring instrument
JPS63238509A (en) * 1987-03-27 1988-10-04 Miyano:Kk Length measuring instrument with laser
KR100481808B1 (en) * 2002-04-12 2005-04-11 한국기계연구원 A untouchable type apparatus for measuring a gear

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