JPS57104832A - Temperature sensor - Google Patents

Temperature sensor

Info

Publication number
JPS57104832A
JPS57104832A JP18238280A JP18238280A JPS57104832A JP S57104832 A JPS57104832 A JP S57104832A JP 18238280 A JP18238280 A JP 18238280A JP 18238280 A JP18238280 A JP 18238280A JP S57104832 A JPS57104832 A JP S57104832A
Authority
JP
Japan
Prior art keywords
vibrator body
temperature sensor
piezo
electrode
vibrator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18238280A
Other languages
Japanese (ja)
Other versions
JPS6112215B2 (en
Inventor
Takeshi Nakamura
Koji Nishiyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Priority to JP18238280A priority Critical patent/JPS57104832A/en
Publication of JPS57104832A publication Critical patent/JPS57104832A/en
Publication of JPS6112215B2 publication Critical patent/JPS6112215B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
    • G01K7/32—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using change of resonant frequency of a crystal

Landscapes

  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Abstract

PURPOSE:To enable manufacturing of a small-sized high-precise temperature sensor which has a rectilinear temperature dependency of a resonance frequency, a low time constant, and a reduced consumption power, by a method wherein a piezo-electric film and an electrode are provided on an optional vibrating surface of a vibrator body made of berylium copper. CONSTITUTION:A piezo-electric film is formed on an optional surface of a vibrator body made of berylium copper, and an electrode is further provided thereon to form a temperature sensor. The vibrator body is formed in a laminar manner, a tuning fork, or a tuning bar, and zinc oxide, zinc sulfide, and other types are formed as the piezo-electric film by a vacuum evaporating, a spattering, an ion plating, or a gaseous phase evaporating method. For example, a tuning fork type vibrator 1 made of a berylium copper alloy is held between the nip formed by support rods 5 and 6 of a stem 4, and the one support rod and said vibrator body are electrically connected together to form a lead terminal. A zinc oxide film 2 is formed on the vibrating surface of said vibrator body a high-frequency spattering method, and an electrode placed thereon is connected to a lead terminal 7 through a lead wire 8 to form a temperature sensor.
JP18238280A 1980-12-22 1980-12-22 Temperature sensor Granted JPS57104832A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18238280A JPS57104832A (en) 1980-12-22 1980-12-22 Temperature sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18238280A JPS57104832A (en) 1980-12-22 1980-12-22 Temperature sensor

Publications (2)

Publication Number Publication Date
JPS57104832A true JPS57104832A (en) 1982-06-30
JPS6112215B2 JPS6112215B2 (en) 1986-04-07

Family

ID=16117329

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18238280A Granted JPS57104832A (en) 1980-12-22 1980-12-22 Temperature sensor

Country Status (1)

Country Link
JP (1) JPS57104832A (en)

Also Published As

Publication number Publication date
JPS6112215B2 (en) 1986-04-07

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