JPS57104833A - Temperature sensor - Google Patents

Temperature sensor

Info

Publication number
JPS57104833A
JPS57104833A JP18238380A JP18238380A JPS57104833A JP S57104833 A JPS57104833 A JP S57104833A JP 18238380 A JP18238380 A JP 18238380A JP 18238380 A JP18238380 A JP 18238380A JP S57104833 A JPS57104833 A JP S57104833A
Authority
JP
Japan
Prior art keywords
temperature sensor
duralumin
vibrator body
electrode
vibrating surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18238380A
Other languages
Japanese (ja)
Other versions
JPS6112216B2 (en
Inventor
Takeshi Nakamura
Koji Nishiyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Priority to JP18238380A priority Critical patent/JPS57104833A/en
Publication of JPS57104833A publication Critical patent/JPS57104833A/en
Publication of JPS6112216B2 publication Critical patent/JPS6112216B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
    • G01K7/32—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using change of resonant frequency of a crystal

Landscapes

  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Abstract

PURPOSE:To permit the manufacture of small-sized and high-precise temperature sensor which has low time constant and a less consumption power, by a method wherein a method wherein a piezo-electric film and an electrode are provided on an optional vibrating surface of a vibrator body made of a duralumin. CONSTITUTION:A piezo-electric film is formed on an optional vibrating surface of a vibrator body made of duralumin, and an electrode is further provided thereon to form a temperature sensor. The vibrator body is formed in a laminar manner, a tuning fork, or a tuning bar, and zinc oxide, zinc sulfide, and other various types are formed as the piezoelectric film by a vacuum evaporating, a spattering, an ion plating, or a gaseous phase evaporateing methode. For example, a tuning fork type vibrator body 1 made of duralumin is held between the nip formed by support rods 5 and 6 of a stem 4, and the one support rod and said body are electrically connected together to form a lead terminal. A zinc oxide film 2 is further formed on the vibrating surface of the body by a high-frequency spattering method, and an electrode placed thereon is connected to a lead terminal 7 with a lead wire 8 to form a temperature sensor.
JP18238380A 1980-12-22 1980-12-22 Temperature sensor Granted JPS57104833A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18238380A JPS57104833A (en) 1980-12-22 1980-12-22 Temperature sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18238380A JPS57104833A (en) 1980-12-22 1980-12-22 Temperature sensor

Publications (2)

Publication Number Publication Date
JPS57104833A true JPS57104833A (en) 1982-06-30
JPS6112216B2 JPS6112216B2 (en) 1986-04-07

Family

ID=16117345

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18238380A Granted JPS57104833A (en) 1980-12-22 1980-12-22 Temperature sensor

Country Status (1)

Country Link
JP (1) JPS57104833A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7320164B2 (en) 2002-01-10 2008-01-22 Murata Manufacturing Co., Ltd. Method of manufacturing an electronic component

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7320164B2 (en) 2002-01-10 2008-01-22 Murata Manufacturing Co., Ltd. Method of manufacturing an electronic component

Also Published As

Publication number Publication date
JPS6112216B2 (en) 1986-04-07

Similar Documents

Publication Publication Date Title
US5343749B1 (en) Single ended tuning fork inertial sensor and method
JPS57199311A (en) Tuning fork type vibrator
JPS57104833A (en) Temperature sensor
JPS57104832A (en) Temperature sensor
JPS57104831A (en) Temperature sensor
JPS57124236A (en) Humidity sensor
JPS57124238A (en) Humidity sensor
JPS54152448A (en) Piezoelectric oscillator
JPS56109017A (en) Tuning fork type piezoelectric oscillator
JPS5549017A (en) Piezoelectric vibrator
JPS52119195A (en) Crystal resonator in tuning fork type
JPS57183116A (en) Piezoelectric oscillator
JPS57206117A (en) Miniature quartz oscillator
JPS57113608A (en) Quartz oscillator
JPS5643815A (en) Quartz oscillator
JPS57145418A (en) Manufacture of tuning fork type piezoelectric oscillator
JPS5991338A (en) Gas sensor
JPS5661899A (en) Control method for temperature characteristic of piezoelectric oscillator
JPS54152492A (en) Piezoelectric vibrator
JPS5357788A (en) Electrode structure of tuning fork type crystal
JPS5372492A (en) Piezo-electric vibrator
JPS5544251A (en) Oscillator
JPS5232291A (en) Tuning fork type piezoelectric oscillator
JPS54113376A (en) Sound wave sensor
JPS5456868A (en) Electronic watch