JPS54152492A - Piezoelectric vibrator - Google Patents

Piezoelectric vibrator

Info

Publication number
JPS54152492A
JPS54152492A JP6140078A JP6140078A JPS54152492A JP S54152492 A JPS54152492 A JP S54152492A JP 6140078 A JP6140078 A JP 6140078A JP 6140078 A JP6140078 A JP 6140078A JP S54152492 A JPS54152492 A JP S54152492A
Authority
JP
Japan
Prior art keywords
vapor
vibrator
ferrodielectric
substance
constant
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6140078A
Other languages
Japanese (ja)
Inventor
Katsuhiro Teraishi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Suwa Seikosha KK
Original Assignee
Seiko Epson Corp
Suwa Seikosha KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp, Suwa Seikosha KK filed Critical Seiko Epson Corp
Priority to JP6140078A priority Critical patent/JPS54152492A/en
Publication of JPS54152492A publication Critical patent/JPS54152492A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/21—Crystal tuning forks

Landscapes

  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Abstract

PURPOSE:To maintain a constant and stable resonance frequency without being influenced by the variation in ambient temperature, by forming a vapor-deposited thin film and ferrodielectric-substance capacity on the surface of a vibrator. CONSTITUTION:A vibrator is worked by photoetching to form an electrode of a vapor-deposited film of Cr and Au in a required shape and also to form a capacity of a vapor-deposited film and ferrodielectric substance on one part of the surface of this vibrator, thereby making a series connection on the circuit. The composition, film thickness and crystallization of the ferrodielectric-substance thin film are controlled by varying the vapor-deposition conditions to suppress temperature hysteresis low, thereby obtaining the required temperature dependency characteristics of the dielectric constant. Consequently, a constant and stable resonance frequency can be maintained under no influence of the variation in ambient temperature.
JP6140078A 1978-05-22 1978-05-22 Piezoelectric vibrator Pending JPS54152492A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6140078A JPS54152492A (en) 1978-05-22 1978-05-22 Piezoelectric vibrator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6140078A JPS54152492A (en) 1978-05-22 1978-05-22 Piezoelectric vibrator

Publications (1)

Publication Number Publication Date
JPS54152492A true JPS54152492A (en) 1979-11-30

Family

ID=13170050

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6140078A Pending JPS54152492A (en) 1978-05-22 1978-05-22 Piezoelectric vibrator

Country Status (1)

Country Link
JP (1) JPS54152492A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6468111A (en) * 1987-09-09 1989-03-14 Hiroshi Shimizu Vibrating element having resonance frequency adjusting function
US9764896B2 (en) 2012-09-04 2017-09-19 Windmöller & Hölscher Kg Device for suctioning off waste products from a production machine, comprising a suction element

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6468111A (en) * 1987-09-09 1989-03-14 Hiroshi Shimizu Vibrating element having resonance frequency adjusting function
US9764896B2 (en) 2012-09-04 2017-09-19 Windmöller & Hölscher Kg Device for suctioning off waste products from a production machine, comprising a suction element

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