JPS5564416A - Vibrator - Google Patents

Vibrator

Info

Publication number
JPS5564416A
JPS5564416A JP13844378A JP13844378A JPS5564416A JP S5564416 A JPS5564416 A JP S5564416A JP 13844378 A JP13844378 A JP 13844378A JP 13844378 A JP13844378 A JP 13844378A JP S5564416 A JPS5564416 A JP S5564416A
Authority
JP
Japan
Prior art keywords
thin
vibrator
piezoelectric
electrode
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13844378A
Other languages
Japanese (ja)
Inventor
Minoru Natori
Hiromi Ueda
Hirohiko Yoshida
Munetaka Tamaru
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Citizen Watch Co Ltd
Original Assignee
Citizen Watch Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Citizen Watch Co Ltd filed Critical Citizen Watch Co Ltd
Priority to JP13844378A priority Critical patent/JPS5564416A/en
Publication of JPS5564416A publication Critical patent/JPS5564416A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/48—Coupling means therefor

Abstract

PURPOSE:To obtain a vibrator with excellent characteristics in terms of aging, a Q value, temperature characteristics, etc., by using a substance which has no piezoelectric characteristics but has excellent characteristics as a metarial for the vibrator. CONSTITUTION:On the flank of a vibrator made of single-crystal member 1 with no piezoelectric characteristics, a thin film of a conductive substance such as metal is formed as lower electrode 2 and a thin-film piezoelectric material of ZnO, etc., is also formed as thin-film piezoelectric layer 3. Further, upper electrode 4 is formed on this thin-film piezoelectric layer 3 and connected to the other upper electrode formed similarly on the flank opposing to the electrode 4 by using lead electrode 5. Then, oscillation circuit 9 is connected, and consequently piezoelectric films 3 and 7 repeat expansion and contraction to vibrate at the natural frequency of single- crystal member 1.
JP13844378A 1978-11-10 1978-11-10 Vibrator Pending JPS5564416A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13844378A JPS5564416A (en) 1978-11-10 1978-11-10 Vibrator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13844378A JPS5564416A (en) 1978-11-10 1978-11-10 Vibrator

Publications (1)

Publication Number Publication Date
JPS5564416A true JPS5564416A (en) 1980-05-15

Family

ID=15222106

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13844378A Pending JPS5564416A (en) 1978-11-10 1978-11-10 Vibrator

Country Status (1)

Country Link
JP (1) JPS5564416A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5438231A (en) * 1993-08-23 1995-08-01 Rockwell International Corporation Thin film micromechanical resonator gyro

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5464490A (en) * 1977-10-31 1979-05-24 Murata Manufacturing Co Tuning fork using piezooelectric crystal membrane

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5464490A (en) * 1977-10-31 1979-05-24 Murata Manufacturing Co Tuning fork using piezooelectric crystal membrane

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5438231A (en) * 1993-08-23 1995-08-01 Rockwell International Corporation Thin film micromechanical resonator gyro

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