JPS57164615A - Piezoelectric oscillator - Google Patents

Piezoelectric oscillator

Info

Publication number
JPS57164615A
JPS57164615A JP4978381A JP4978381A JPS57164615A JP S57164615 A JPS57164615 A JP S57164615A JP 4978381 A JP4978381 A JP 4978381A JP 4978381 A JP4978381 A JP 4978381A JP S57164615 A JPS57164615 A JP S57164615A
Authority
JP
Japan
Prior art keywords
exciting electrodes
heating element
resistance heating
conductive film
conductive parts
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4978381A
Other languages
Japanese (ja)
Inventor
Seiichi Igarashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Matsushima Kogyo KK
Original Assignee
Matsushima Kogyo KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushima Kogyo KK filed Critical Matsushima Kogyo KK
Priority to JP4978381A priority Critical patent/JPS57164615A/en
Publication of JPS57164615A publication Critical patent/JPS57164615A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders; Supports
    • H03H9/08—Holders with means for regulating temperature

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Abstract

PURPOSE:To improve the quality, by providing exciting electrodes and a resistance heating element as a mutilayered conductive film on the surface of a piezoelectric oscillating bar. CONSTITUTION:Exciting electrodes 2 ane 2' are formed as the first conductive film on the surface of a quartz oscillating bar 1 by the photolithography or the like. A thin film 5 consisting of insulating materials such as SiO is provided on the surface except conductive parts 3 and 4 of exciting electrodes 2 and 2' by the vapor-deposition, the sputtering, the ion plating, or the like. After that, a resistance heating element 6 is formed as the second conductive film by the photolithography or the like. After connecting conductive parts 3 and 4 of exciting electrodes 2 and 2' to lead wires 8 and 9 of a stem 1 and connecting conductive parts 12 and 13 of the resistance heating element 6 to lead wires 10 and 11, a cylindrical case 14 is sealed tightly, thus completing a cylindrical quartz oscillator.
JP4978381A 1981-04-02 1981-04-02 Piezoelectric oscillator Pending JPS57164615A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4978381A JPS57164615A (en) 1981-04-02 1981-04-02 Piezoelectric oscillator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4978381A JPS57164615A (en) 1981-04-02 1981-04-02 Piezoelectric oscillator

Publications (1)

Publication Number Publication Date
JPS57164615A true JPS57164615A (en) 1982-10-09

Family

ID=12840753

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4978381A Pending JPS57164615A (en) 1981-04-02 1981-04-02 Piezoelectric oscillator

Country Status (1)

Country Link
JP (1) JPS57164615A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2000005812A1 (en) * 1998-07-24 2000-02-03 Seiko Epson Corporation Piezo-oscillator and production method thereof

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2000005812A1 (en) * 1998-07-24 2000-02-03 Seiko Epson Corporation Piezo-oscillator and production method thereof
US6661162B1 (en) 1998-07-24 2003-12-09 Seiko Epson Corporation Piezoelectric resonator and method of producing the same
US6961981B2 (en) 1998-07-24 2005-11-08 Seiko Epson Corporation Method of producing a piezoelectric resonator

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