JPS57103004A - Method for measuring film thickness of surface - Google Patents

Method for measuring film thickness of surface

Info

Publication number
JPS57103004A
JPS57103004A JP18015080A JP18015080A JPS57103004A JP S57103004 A JPS57103004 A JP S57103004A JP 18015080 A JP18015080 A JP 18015080A JP 18015080 A JP18015080 A JP 18015080A JP S57103004 A JPS57103004 A JP S57103004A
Authority
JP
Japan
Prior art keywords
measured
film
thickness
wavelength
absorption
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18015080A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0337123B2 (enrdf_load_stackoverflow
Inventor
Akira Torao
Yuichiro Asano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
JFE Steel Corp
Original Assignee
Kawasaki Steel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kawasaki Steel Corp filed Critical Kawasaki Steel Corp
Priority to JP18015080A priority Critical patent/JPS57103004A/ja
Publication of JPS57103004A publication Critical patent/JPS57103004A/ja
Publication of JPH0337123B2 publication Critical patent/JPH0337123B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP18015080A 1980-12-19 1980-12-19 Method for measuring film thickness of surface Granted JPS57103004A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18015080A JPS57103004A (en) 1980-12-19 1980-12-19 Method for measuring film thickness of surface

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18015080A JPS57103004A (en) 1980-12-19 1980-12-19 Method for measuring film thickness of surface

Publications (2)

Publication Number Publication Date
JPS57103004A true JPS57103004A (en) 1982-06-26
JPH0337123B2 JPH0337123B2 (enrdf_load_stackoverflow) 1991-06-04

Family

ID=16078267

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18015080A Granted JPS57103004A (en) 1980-12-19 1980-12-19 Method for measuring film thickness of surface

Country Status (1)

Country Link
JP (1) JPS57103004A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2674325A1 (fr) * 1991-03-18 1992-09-25 Lorraine Laminage Procede et dispositif de mesure d'une epaisseur d'un revetement sur un substrat metallique.
JPH08193813A (ja) * 1994-12-20 1996-07-30 Korea Electron Telecommun 金属有機物の化学蒸着による膜のモニタリング装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49123060A (enrdf_load_stackoverflow) * 1973-03-28 1974-11-25

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49123060A (enrdf_load_stackoverflow) * 1973-03-28 1974-11-25

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2674325A1 (fr) * 1991-03-18 1992-09-25 Lorraine Laminage Procede et dispositif de mesure d'une epaisseur d'un revetement sur un substrat metallique.
JPH08193813A (ja) * 1994-12-20 1996-07-30 Korea Electron Telecommun 金属有機物の化学蒸着による膜のモニタリング装置

Also Published As

Publication number Publication date
JPH0337123B2 (enrdf_load_stackoverflow) 1991-06-04

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