JPS57101736A - Pressure sensor - Google Patents
Pressure sensorInfo
- Publication number
- JPS57101736A JPS57101736A JP17723180A JP17723180A JPS57101736A JP S57101736 A JPS57101736 A JP S57101736A JP 17723180 A JP17723180 A JP 17723180A JP 17723180 A JP17723180 A JP 17723180A JP S57101736 A JPS57101736 A JP S57101736A
- Authority
- JP
- Japan
- Prior art keywords
- fixing substrate
- bonded
- sensing element
- hermetically
- constitution
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/14—Housings
- G01L19/147—Details about the mounting of the sensor to support or covering means
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
- Pressure Sensors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17723180A JPS57101736A (en) | 1980-12-17 | 1980-12-17 | Pressure sensor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17723180A JPS57101736A (en) | 1980-12-17 | 1980-12-17 | Pressure sensor |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS57101736A true JPS57101736A (en) | 1982-06-24 |
Family
ID=16027439
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP17723180A Pending JPS57101736A (en) | 1980-12-17 | 1980-12-17 | Pressure sensor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57101736A (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63177030A (ja) * | 1987-01-19 | 1988-07-21 | Nippon Denso Co Ltd | 半導体圧力センサ |
-
1980
- 1980-12-17 JP JP17723180A patent/JPS57101736A/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63177030A (ja) * | 1987-01-19 | 1988-07-21 | Nippon Denso Co Ltd | 半導体圧力センサ |
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