JPS57101414A - Surface acoustic wave element - Google Patents
Surface acoustic wave elementInfo
- Publication number
- JPS57101414A JPS57101414A JP17737180A JP17737180A JPS57101414A JP S57101414 A JPS57101414 A JP S57101414A JP 17737180 A JP17737180 A JP 17737180A JP 17737180 A JP17737180 A JP 17737180A JP S57101414 A JPS57101414 A JP S57101414A
- Authority
- JP
- Japan
- Prior art keywords
- film
- silicon oxide
- zinc oxide
- oxide film
- temperature characteristics
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/08—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of resonators or networks using surface acoustic waves
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17737180A JPS57101414A (en) | 1980-12-16 | 1980-12-16 | Surface acoustic wave element |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17737180A JPS57101414A (en) | 1980-12-16 | 1980-12-16 | Surface acoustic wave element |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS57101414A true JPS57101414A (en) | 1982-06-24 |
Family
ID=16029779
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP17737180A Pending JPS57101414A (en) | 1980-12-16 | 1980-12-16 | Surface acoustic wave element |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57101414A (ja) |
-
1980
- 1980-12-16 JP JP17737180A patent/JPS57101414A/ja active Pending
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