JPS5694248A - Detector for foreign matter on surface - Google Patents

Detector for foreign matter on surface

Info

Publication number
JPS5694248A
JPS5694248A JP17101979A JP17101979A JPS5694248A JP S5694248 A JPS5694248 A JP S5694248A JP 17101979 A JP17101979 A JP 17101979A JP 17101979 A JP17101979 A JP 17101979A JP S5694248 A JPS5694248 A JP S5694248A
Authority
JP
Japan
Prior art keywords
signal
amplitude
foreign matter
gate
outputted
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17101979A
Other languages
English (en)
Japanese (ja)
Other versions
JPH02660B2 (ko
Inventor
Kenichi Kobayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP17101979A priority Critical patent/JPS5694248A/ja
Publication of JPS5694248A publication Critical patent/JPS5694248A/ja
Publication of JPH02660B2 publication Critical patent/JPH02660B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/94—Investigating contamination, e.g. dust

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP17101979A 1979-12-28 1979-12-28 Detector for foreign matter on surface Granted JPS5694248A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17101979A JPS5694248A (en) 1979-12-28 1979-12-28 Detector for foreign matter on surface

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17101979A JPS5694248A (en) 1979-12-28 1979-12-28 Detector for foreign matter on surface

Publications (2)

Publication Number Publication Date
JPS5694248A true JPS5694248A (en) 1981-07-30
JPH02660B2 JPH02660B2 (ko) 1990-01-09

Family

ID=15915575

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17101979A Granted JPS5694248A (en) 1979-12-28 1979-12-28 Detector for foreign matter on surface

Country Status (1)

Country Link
JP (1) JPS5694248A (ko)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58151544A (ja) * 1982-03-05 1983-09-08 Nippon Jido Seigyo Kk 暗視野像による欠陥検査装置
JPS58223328A (ja) * 1982-06-22 1983-12-24 Toshiba Corp マスク欠陥検査装置
JPS60209187A (ja) * 1984-07-17 1985-10-21 Matsushita Graphic Commun Syst Inc 固体撮像素子の検査装置
FR2651579A1 (fr) * 1989-09-06 1991-03-08 Zeiss Carl Fa Dispositif pour la mesure sensible de la lumiere diffusee sur un composant optique.

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4957887A (ko) * 1972-09-30 1974-06-05
JPS50143590A (ko) * 1974-05-08 1975-11-19

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4957887A (ko) * 1972-09-30 1974-06-05
JPS50143590A (ko) * 1974-05-08 1975-11-19

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58151544A (ja) * 1982-03-05 1983-09-08 Nippon Jido Seigyo Kk 暗視野像による欠陥検査装置
JPS58223328A (ja) * 1982-06-22 1983-12-24 Toshiba Corp マスク欠陥検査装置
JPS60209187A (ja) * 1984-07-17 1985-10-21 Matsushita Graphic Commun Syst Inc 固体撮像素子の検査装置
FR2651579A1 (fr) * 1989-09-06 1991-03-08 Zeiss Carl Fa Dispositif pour la mesure sensible de la lumiere diffusee sur un composant optique.

Also Published As

Publication number Publication date
JPH02660B2 (ko) 1990-01-09

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