JPS5693878A - Formation of tapered etched film - Google Patents
Formation of tapered etched filmInfo
- Publication number
- JPS5693878A JPS5693878A JP17201679A JP17201679A JPS5693878A JP S5693878 A JPS5693878 A JP S5693878A JP 17201679 A JP17201679 A JP 17201679A JP 17201679 A JP17201679 A JP 17201679A JP S5693878 A JPS5693878 A JP S5693878A
- Authority
- JP
- Japan
- Prior art keywords
- film
- thin
- thin film
- etched
- tapered
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To form the thin tapered etched film in fabricating a thin film magnetic head by a method wherein the thin film of Al or an Al alloy is formed on a substrate plate and, after a surface thereof is oxidized, a resist layer is formed and etching is carried out.
CONSTITUTION: The thin film 11 of Al or the Al alloy is formed on the substrate plate by vapor deposition or the like and the stable thin oxide film 12 is formed on the thin film 11 by changing the atmosphere to the oxidative atmosphere. A desired resist film 13 is formed on said oxide film and, thereafter, said coated substrate plate is immersed in an etching solution. At firts, the oxide film 12 is rapidly etched and, subsequently, the thin film 11 is etched and the etched area is spread out to an underside of the resist film 13 and, finally, a cross area of the thin film 11 becomes tapered. In thin point, the etching treatment is stopped and a tapered angle without irregularities is formed.
COPYRIGHT: (C)1981,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17201679A JPS5693878A (en) | 1979-12-27 | 1979-12-27 | Formation of tapered etched film |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17201679A JPS5693878A (en) | 1979-12-27 | 1979-12-27 | Formation of tapered etched film |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5693878A true JPS5693878A (en) | 1981-07-29 |
Family
ID=15933955
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP17201679A Pending JPS5693878A (en) | 1979-12-27 | 1979-12-27 | Formation of tapered etched film |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5693878A (en) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5217995A (en) * | 1975-07-31 | 1977-02-10 | Haadouitsukuu Etsutaa Co | Automatic packing device |
-
1979
- 1979-12-27 JP JP17201679A patent/JPS5693878A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5217995A (en) * | 1975-07-31 | 1977-02-10 | Haadouitsukuu Etsutaa Co | Automatic packing device |
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