JPS5691367A - Ion injector - Google Patents

Ion injector

Info

Publication number
JPS5691367A
JPS5691367A JP16812679A JP16812679A JPS5691367A JP S5691367 A JPS5691367 A JP S5691367A JP 16812679 A JP16812679 A JP 16812679A JP 16812679 A JP16812679 A JP 16812679A JP S5691367 A JPS5691367 A JP S5691367A
Authority
JP
Japan
Prior art keywords
ion
ions
malfunction
wafer
processed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16812679A
Other languages
Japanese (ja)
Inventor
Shinichi Miyashita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP16812679A priority Critical patent/JPS5691367A/en
Publication of JPS5691367A publication Critical patent/JPS5691367A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor

Abstract

PURPOSE:To prevent injection of undesirable ions which is caused by malfunction, by providing an ion detector in front of a Faraday cup holding water to be processed for judging ions. CONSTITUTION:Only the desired ion among many kinds of ions generated in an ion source head 1 is treated in the electromagnetic field by analyzer 2, led to a path 11, accelerated by an accelerator 3, and radiated over the whole surface of wafer 8 to be processed while being scanned by a scanner 4. An ion detector 5 such as an ion spectrum analyzer is provided in front of the Faraday cup 7 holding the wafer, and connected with an ion display circuit 9. Accordingly, when an undesirable ions are radiated by an operator's wrong operation or malfunction of the device, it is possible to stop immediately the irradiation. Therefore, only desirable ion can always be injected.
JP16812679A 1979-12-26 1979-12-26 Ion injector Pending JPS5691367A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16812679A JPS5691367A (en) 1979-12-26 1979-12-26 Ion injector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16812679A JPS5691367A (en) 1979-12-26 1979-12-26 Ion injector

Publications (1)

Publication Number Publication Date
JPS5691367A true JPS5691367A (en) 1981-07-24

Family

ID=15862318

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16812679A Pending JPS5691367A (en) 1979-12-26 1979-12-26 Ion injector

Country Status (1)

Country Link
JP (1) JPS5691367A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0731626A1 (en) * 1995-03-06 1996-09-11 Mitsubishi Jukogyo Kabushiki Kaisha Charged particle accelerator apparatus and electronic sterilizer apparatus using the same

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0731626A1 (en) * 1995-03-06 1996-09-11 Mitsubishi Jukogyo Kabushiki Kaisha Charged particle accelerator apparatus and electronic sterilizer apparatus using the same
US5849252A (en) * 1995-03-06 1998-12-15 Mitsubishi Jukogyo Kabushiki Kaisha Charged particle accelerator apparatus and electronic sterilizer apparatus using the same

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