JPS5685711A - Manufacture of diffraction grating - Google Patents
Manufacture of diffraction gratingInfo
- Publication number
- JPS5685711A JPS5685711A JP16248279A JP16248279A JPS5685711A JP S5685711 A JPS5685711 A JP S5685711A JP 16248279 A JP16248279 A JP 16248279A JP 16248279 A JP16248279 A JP 16248279A JP S5685711 A JPS5685711 A JP S5685711A
- Authority
- JP
- Japan
- Prior art keywords
- diffraction grating
- substrate
- manufacture
- pattern
- metal mold
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Diffracting Gratings Or Hologram Optical Elements (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16248279A JPS5685711A (en) | 1979-12-14 | 1979-12-14 | Manufacture of diffraction grating |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16248279A JPS5685711A (en) | 1979-12-14 | 1979-12-14 | Manufacture of diffraction grating |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5685711A true JPS5685711A (en) | 1981-07-13 |
Family
ID=15755448
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP16248279A Pending JPS5685711A (en) | 1979-12-14 | 1979-12-14 | Manufacture of diffraction grating |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5685711A (ja) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58117511A (ja) * | 1981-12-30 | 1983-07-13 | Fujitsu Ltd | 回折格子 |
EP0997559A1 (en) * | 1998-10-22 | 2000-05-03 | Westbury Development Europa B.V. | A method to form thin films and thick layers of single crystal structure by electro-plating |
EP1216970A2 (en) * | 2000-12-04 | 2002-06-26 | Nippon Sheet Glass Co., Ltd. | Optical device, mold, and method of producing the same |
JP2008013417A (ja) * | 2006-07-07 | 2008-01-24 | National Institute For Materials Science | ガラスプレス用モールドの作製方法 |
JP2008298199A (ja) * | 2007-05-31 | 2008-12-11 | Kawamoto Pump Mfg Co Ltd | 止め輪及び止め輪を用いたストレーナ内蔵ボール弁装置。 |
CN106990461A (zh) * | 2016-01-20 | 2017-07-28 | 上海新微技术研发中心有限公司 | 一种直角顶角硅阶梯光栅及其制造方法 |
-
1979
- 1979-12-14 JP JP16248279A patent/JPS5685711A/ja active Pending
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58117511A (ja) * | 1981-12-30 | 1983-07-13 | Fujitsu Ltd | 回折格子 |
EP0997559A1 (en) * | 1998-10-22 | 2000-05-03 | Westbury Development Europa B.V. | A method to form thin films and thick layers of single crystal structure by electro-plating |
EP1216970A2 (en) * | 2000-12-04 | 2002-06-26 | Nippon Sheet Glass Co., Ltd. | Optical device, mold, and method of producing the same |
EP1216970A3 (en) * | 2000-12-04 | 2008-06-25 | Nippon Sheet Glass Co., Ltd. | Optical device, mold, and method of producing the same |
JP2008013417A (ja) * | 2006-07-07 | 2008-01-24 | National Institute For Materials Science | ガラスプレス用モールドの作製方法 |
JP2008298199A (ja) * | 2007-05-31 | 2008-12-11 | Kawamoto Pump Mfg Co Ltd | 止め輪及び止め輪を用いたストレーナ内蔵ボール弁装置。 |
CN106990461A (zh) * | 2016-01-20 | 2017-07-28 | 上海新微技术研发中心有限公司 | 一种直角顶角硅阶梯光栅及其制造方法 |
CN106990461B (zh) * | 2016-01-20 | 2020-05-15 | 安徽中科米微电子技术有限公司 | 一种直角顶角硅阶梯光栅及其制造方法 |
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