JPS5685711A - Manufacture of diffraction grating - Google Patents

Manufacture of diffraction grating

Info

Publication number
JPS5685711A
JPS5685711A JP16248279A JP16248279A JPS5685711A JP S5685711 A JPS5685711 A JP S5685711A JP 16248279 A JP16248279 A JP 16248279A JP 16248279 A JP16248279 A JP 16248279A JP S5685711 A JPS5685711 A JP S5685711A
Authority
JP
Japan
Prior art keywords
diffraction grating
substrate
manufacture
pattern
metal mold
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16248279A
Other languages
English (en)
Inventor
Tetsuo Yoshizawa
Takashi Kurokawa
Yuzo Katayama
Yoji Fujii
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP16248279A priority Critical patent/JPS5685711A/ja
Publication of JPS5685711A publication Critical patent/JPS5685711A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Diffracting Gratings Or Hologram Optical Elements (AREA)
JP16248279A 1979-12-14 1979-12-14 Manufacture of diffraction grating Pending JPS5685711A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16248279A JPS5685711A (en) 1979-12-14 1979-12-14 Manufacture of diffraction grating

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16248279A JPS5685711A (en) 1979-12-14 1979-12-14 Manufacture of diffraction grating

Publications (1)

Publication Number Publication Date
JPS5685711A true JPS5685711A (en) 1981-07-13

Family

ID=15755448

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16248279A Pending JPS5685711A (en) 1979-12-14 1979-12-14 Manufacture of diffraction grating

Country Status (1)

Country Link
JP (1) JPS5685711A (ja)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58117511A (ja) * 1981-12-30 1983-07-13 Fujitsu Ltd 回折格子
EP0997559A1 (en) * 1998-10-22 2000-05-03 Westbury Development Europa B.V. A method to form thin films and thick layers of single crystal structure by electro-plating
EP1216970A2 (en) * 2000-12-04 2002-06-26 Nippon Sheet Glass Co., Ltd. Optical device, mold, and method of producing the same
JP2008013417A (ja) * 2006-07-07 2008-01-24 National Institute For Materials Science ガラスプレス用モールドの作製方法
JP2008298199A (ja) * 2007-05-31 2008-12-11 Kawamoto Pump Mfg Co Ltd 止め輪及び止め輪を用いたストレーナ内蔵ボール弁装置。
CN106990461A (zh) * 2016-01-20 2017-07-28 上海新微技术研发中心有限公司 一种直角顶角硅阶梯光栅及其制造方法

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58117511A (ja) * 1981-12-30 1983-07-13 Fujitsu Ltd 回折格子
EP0997559A1 (en) * 1998-10-22 2000-05-03 Westbury Development Europa B.V. A method to form thin films and thick layers of single crystal structure by electro-plating
EP1216970A2 (en) * 2000-12-04 2002-06-26 Nippon Sheet Glass Co., Ltd. Optical device, mold, and method of producing the same
EP1216970A3 (en) * 2000-12-04 2008-06-25 Nippon Sheet Glass Co., Ltd. Optical device, mold, and method of producing the same
JP2008013417A (ja) * 2006-07-07 2008-01-24 National Institute For Materials Science ガラスプレス用モールドの作製方法
JP2008298199A (ja) * 2007-05-31 2008-12-11 Kawamoto Pump Mfg Co Ltd 止め輪及び止め輪を用いたストレーナ内蔵ボール弁装置。
CN106990461A (zh) * 2016-01-20 2017-07-28 上海新微技术研发中心有限公司 一种直角顶角硅阶梯光栅及其制造方法
CN106990461B (zh) * 2016-01-20 2020-05-15 安徽中科米微电子技术有限公司 一种直角顶角硅阶梯光栅及其制造方法

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