JPS5683045A - Wafer probe - Google Patents
Wafer probeInfo
- Publication number
- JPS5683045A JPS5683045A JP16054379A JP16054379A JPS5683045A JP S5683045 A JPS5683045 A JP S5683045A JP 16054379 A JP16054379 A JP 16054379A JP 16054379 A JP16054379 A JP 16054379A JP S5683045 A JPS5683045 A JP S5683045A
- Authority
- JP
- Japan
- Prior art keywords
- chip
- indicated
- display
- control
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16054379A JPS5683045A (en) | 1979-12-10 | 1979-12-10 | Wafer probe |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16054379A JPS5683045A (en) | 1979-12-10 | 1979-12-10 | Wafer probe |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5683045A true JPS5683045A (en) | 1981-07-07 |
Family
ID=15717250
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP16054379A Pending JPS5683045A (en) | 1979-12-10 | 1979-12-10 | Wafer probe |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5683045A (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6098636A (ja) * | 1983-11-04 | 1985-06-01 | Hitachi Ltd | 自動ウェハ処理装置 |
JPS6435928A (en) * | 1987-07-30 | 1989-02-07 | Tokyo Electron Ltd | Semiconductor inspection device |
JP2008235386A (ja) * | 2007-03-19 | 2008-10-02 | Yokogawa Electric Corp | 半導体試験装置、ウエハマップ表示装置及びウエハマップ表示プログラム |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5075773A (ja) * | 1973-11-06 | 1975-06-21 | ||
JPS5080776A (ja) * | 1973-11-14 | 1975-07-01 |
-
1979
- 1979-12-10 JP JP16054379A patent/JPS5683045A/ja active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5075773A (ja) * | 1973-11-06 | 1975-06-21 | ||
JPS5080776A (ja) * | 1973-11-14 | 1975-07-01 |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6098636A (ja) * | 1983-11-04 | 1985-06-01 | Hitachi Ltd | 自動ウェハ処理装置 |
JPH0516179B2 (ja) * | 1983-11-04 | 1993-03-03 | Hitachi Ltd | |
JPS6435928A (en) * | 1987-07-30 | 1989-02-07 | Tokyo Electron Ltd | Semiconductor inspection device |
JP2008235386A (ja) * | 2007-03-19 | 2008-10-02 | Yokogawa Electric Corp | 半導体試験装置、ウエハマップ表示装置及びウエハマップ表示プログラム |
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