JPS5681813A - Mask lighting optical system - Google Patents
Mask lighting optical systemInfo
- Publication number
- JPS5681813A JPS5681813A JP15874079A JP15874079A JPS5681813A JP S5681813 A JPS5681813 A JP S5681813A JP 15874079 A JP15874079 A JP 15874079A JP 15874079 A JP15874079 A JP 15874079A JP S5681813 A JPS5681813 A JP S5681813A
- Authority
- JP
- Japan
- Prior art keywords
- focus
- lens
- elliptical mirror
- image
- ultraviolet rays
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70058—Mask illumination systems
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Microscoopes, Condenser (AREA)
- Light Sources And Details Of Projection-Printing Devices (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15874079A JPS5681813A (en) | 1979-12-08 | 1979-12-08 | Mask lighting optical system |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15874079A JPS5681813A (en) | 1979-12-08 | 1979-12-08 | Mask lighting optical system |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62131848A Division JPS63113412A (ja) | 1987-05-29 | 1987-05-29 | マスク照明光学系 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5681813A true JPS5681813A (en) | 1981-07-04 |
JPS633288B2 JPS633288B2 (ja) | 1988-01-22 |
Family
ID=15678290
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15874079A Granted JPS5681813A (en) | 1979-12-08 | 1979-12-08 | Mask lighting optical system |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5681813A (ja) |
Cited By (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5850511A (ja) * | 1981-09-21 | 1983-03-25 | Mikasa Kk | Icパタ−ン転写装置における照明光学系 |
JPS5850510A (ja) * | 1981-09-21 | 1983-03-25 | Mikasa Kk | Icパタ−ン転写装置における照明光学系 |
JPS59226317A (ja) * | 1983-06-06 | 1984-12-19 | Nippon Kogaku Kk <Nikon> | 照明装置 |
JPS6150917U (ja) * | 1984-09-10 | 1986-04-05 | ||
US4680579A (en) * | 1983-09-08 | 1987-07-14 | Texas Instruments Incorporated | Optical system for projection display using spatial light modulator device |
JPS6325640A (ja) * | 1986-07-18 | 1988-02-03 | Oak Seisakusho:Kk | 平行光投射光学系 |
US4939630A (en) * | 1986-09-09 | 1990-07-03 | Nikon Corporation | Illumination optical apparatus |
JPH02308106A (ja) * | 1989-05-23 | 1990-12-21 | Citizen Watch Co Ltd | 直線遍光光源 |
US4998191A (en) * | 1988-10-28 | 1991-03-05 | Asahi Kogaku Kogyo Kabushiki Kaisha | Illuminating optical device |
JPH03202149A (ja) * | 1989-12-28 | 1991-09-03 | Ushio Inc | 光照射装置 |
JPH03202148A (ja) * | 1989-12-28 | 1991-09-03 | Ushio Inc | 光照射装置 |
JPH03202147A (ja) * | 1989-12-28 | 1991-09-03 | Ushio Inc | 光学ユニット及びこの光学ユニットが接合される光照射装置 |
JPH03211556A (ja) * | 1990-01-17 | 1991-09-17 | Ushio Inc | 光学ユニット |
FR2696235A1 (fr) * | 1992-09-30 | 1994-04-01 | Patrice Rat | Dispositif d'éclairement pour système d'analyse à fluorescence, par exemple fluorimètre pour microtitration notamment en biologie cellulaire. |
US5345292A (en) * | 1992-03-31 | 1994-09-06 | Canon Kabushiki Kaisha | Illumination device for projection exposure apparatus |
US5488230A (en) * | 1992-07-15 | 1996-01-30 | Nikon Corporation | Double-beam light source apparatus, position detecting apparatus and aligning apparatus |
US5760963A (en) * | 1995-03-22 | 1998-06-02 | Nikon Corporation | Fly-eye lens, illumination optical apparatus, and exposure apparatus |
US6452661B1 (en) | 1998-02-27 | 2002-09-17 | Nikon Corporation | Illumination system and exposure apparatus and method |
WO2013187299A1 (ja) * | 2012-06-15 | 2013-12-19 | ウシオ電機株式会社 | 光照射装置、露光装置 |
-
1979
- 1979-12-08 JP JP15874079A patent/JPS5681813A/ja active Granted
Cited By (25)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5850511A (ja) * | 1981-09-21 | 1983-03-25 | Mikasa Kk | Icパタ−ン転写装置における照明光学系 |
JPS5850510A (ja) * | 1981-09-21 | 1983-03-25 | Mikasa Kk | Icパタ−ン転写装置における照明光学系 |
JPS59226317A (ja) * | 1983-06-06 | 1984-12-19 | Nippon Kogaku Kk <Nikon> | 照明装置 |
JPH0552487B2 (ja) * | 1983-06-06 | 1993-08-05 | Nippon Kogaku Kk | |
US4680579A (en) * | 1983-09-08 | 1987-07-14 | Texas Instruments Incorporated | Optical system for projection display using spatial light modulator device |
JPS6150917U (ja) * | 1984-09-10 | 1986-04-05 | ||
JPS6325640A (ja) * | 1986-07-18 | 1988-02-03 | Oak Seisakusho:Kk | 平行光投射光学系 |
US4939630A (en) * | 1986-09-09 | 1990-07-03 | Nikon Corporation | Illumination optical apparatus |
US4998191A (en) * | 1988-10-28 | 1991-03-05 | Asahi Kogaku Kogyo Kabushiki Kaisha | Illuminating optical device |
JPH02308106A (ja) * | 1989-05-23 | 1990-12-21 | Citizen Watch Co Ltd | 直線遍光光源 |
JPH03202149A (ja) * | 1989-12-28 | 1991-09-03 | Ushio Inc | 光照射装置 |
JPH03202148A (ja) * | 1989-12-28 | 1991-09-03 | Ushio Inc | 光照射装置 |
JPH03202147A (ja) * | 1989-12-28 | 1991-09-03 | Ushio Inc | 光学ユニット及びこの光学ユニットが接合される光照射装置 |
JPH03211556A (ja) * | 1990-01-17 | 1991-09-17 | Ushio Inc | 光学ユニット |
US5345292A (en) * | 1992-03-31 | 1994-09-06 | Canon Kabushiki Kaisha | Illumination device for projection exposure apparatus |
US5726740A (en) * | 1992-03-31 | 1998-03-10 | Canon Kabushiki Kaisha | Projection exposure apparatus having illumination device with ring-like or spot-like light source |
US5488230A (en) * | 1992-07-15 | 1996-01-30 | Nikon Corporation | Double-beam light source apparatus, position detecting apparatus and aligning apparatus |
FR2696235A1 (fr) * | 1992-09-30 | 1994-04-01 | Patrice Rat | Dispositif d'éclairement pour système d'analyse à fluorescence, par exemple fluorimètre pour microtitration notamment en biologie cellulaire. |
EP0591034A2 (fr) * | 1992-09-30 | 1994-04-06 | Patrice Rat | Dispositif d'éclairement pour systèmes d'analyse à fluorescences, par exemple, fluorimètre pour microtitration notamment en biologie cellulaire |
EP0591034A3 (fr) * | 1992-09-30 | 1994-04-27 | Patrice Rat | Dispositif d'éclairement pour systèmes d'analyse à fluorescences, par exemple, fluorimètre pour microtitration notamment en biologie cellulaire |
US5760963A (en) * | 1995-03-22 | 1998-06-02 | Nikon Corporation | Fly-eye lens, illumination optical apparatus, and exposure apparatus |
US6452661B1 (en) | 1998-02-27 | 2002-09-17 | Nikon Corporation | Illumination system and exposure apparatus and method |
US6665051B2 (en) | 1998-02-27 | 2003-12-16 | Nikon Corporation | Illumination system and exposure apparatus and method |
US7023953B2 (en) | 1998-02-27 | 2006-04-04 | Nikon Corporation | Illumination system and exposure apparatus and method |
WO2013187299A1 (ja) * | 2012-06-15 | 2013-12-19 | ウシオ電機株式会社 | 光照射装置、露光装置 |
Also Published As
Publication number | Publication date |
---|---|
JPS633288B2 (ja) | 1988-01-22 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS5681813A (en) | Mask lighting optical system | |
CN100414346C (zh) | 具有反射准直仪的照明单元和包括其的图像投影系统 | |
CA2440782A1 (en) | Projection type display apparatus, rear projector, and multi-vision system | |
WO2002063390A3 (en) | An illumination engine for a projection display using a tapered light pipe | |
JPS57150812A (en) | Dark field illuminating optical system | |
JP2008046479A (ja) | 照明光学系およびこれを備えた投写型画像表示装置 | |
JPS5714818A (en) | Reflection lighting type projector | |
JP2004126283A (ja) | ロッドインテグレータ及びプロジェクタ | |
JPS6449017A (en) | Projection optical system | |
JPS54111218A (en) | Image pickup unit | |
JPS5420750A (en) | Photo coupler | |
JPS5528013A (en) | Episcope | |
JPS55105204A (en) | Optical path branching filter | |
JPS5692553A (en) | Lighting device | |
JPS54123948A (en) | Projector | |
JPS57210308A (en) | Focus detecting device | |
JPS5674274A (en) | Lighting device for slit exposure | |
JPS56120259A (en) | Reader for equimultiple type video information | |
JPS62150315A (ja) | 照明光学系 | |
JPH0248090B2 (ja) | ||
JPS5785019A (en) | Lighting device | |
JPS54137342A (en) | Fixer | |
JPS5557805A (en) | Area light source for projecting optical system | |
JPS53106118A (en) | Lens iris for optical system | |
JPS6483394A (en) | Laser beam machine |