JPS5785019A - Lighting device - Google Patents

Lighting device

Info

Publication number
JPS5785019A
JPS5785019A JP55162343A JP16234380A JPS5785019A JP S5785019 A JPS5785019 A JP S5785019A JP 55162343 A JP55162343 A JP 55162343A JP 16234380 A JP16234380 A JP 16234380A JP S5785019 A JPS5785019 A JP S5785019A
Authority
JP
Japan
Prior art keywords
light source
optical system
luminous flux
parabolic reflector
focus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP55162343A
Other languages
Japanese (ja)
Inventor
Akira Anzai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Nippon Kogaku KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp, Nippon Kogaku KK filed Critical Nikon Corp
Priority to JP55162343A priority Critical patent/JPS5785019A/en
Publication of JPS5785019A publication Critical patent/JPS5785019A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B27/00—Photographic printing apparatus
    • G03B27/32—Projection printing apparatus, e.g. enlarger, copying camera
    • G03B27/52—Details
    • G03B27/54—Lamp housings; Illuminating means
    • G03B27/545—Lamp housings; Illuminating means for enlargers

Abstract

PURPOSE:To adjust a light source to a correct position efficiently in a short time, by constituting a light source position detecting optical system so that a light source image is formed by fetching a part of a luminous flux generated from the light source. CONSTITUTION:A superhigh-pressure mercury arc lamp 1 is provided on a focus F of a parabolic reflector 2, a luminous flux reflected by the parabolic reflector 2 becomes a parallel luminous flux along with an optical axis A0, and baking and exposure of a wafer 9 are executed by lighting a mask 8. The first light source position detecting optical system consisting of a reflector 3a, a positive lens 4a and a marking plate 5a and the second optical system similar to the first optical system are provided on positions separated from the optical axis A0. In this constitution, a cross line showing a position conjugating with a focus of the parabolic reflector 2 is provided on the marking plates 5a, 5b in advance, and when the light source 1 is adjusted so that the light source image is made to conform with this cross line, the light source 1 is located efficiently and very exactly in a short time.
JP55162343A 1980-11-18 1980-11-18 Lighting device Pending JPS5785019A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55162343A JPS5785019A (en) 1980-11-18 1980-11-18 Lighting device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55162343A JPS5785019A (en) 1980-11-18 1980-11-18 Lighting device

Publications (1)

Publication Number Publication Date
JPS5785019A true JPS5785019A (en) 1982-05-27

Family

ID=15752744

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55162343A Pending JPS5785019A (en) 1980-11-18 1980-11-18 Lighting device

Country Status (1)

Country Link
JP (1) JPS5785019A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63311220A (en) * 1987-06-12 1988-12-20 Nikon Corp Illuminator provided with ellipsoidal mirror
JPH01155621A (en) * 1987-12-11 1989-06-19 Canon Inc Lighting system
US6727980B2 (en) 1998-09-17 2004-04-27 Nikon Corporation Apparatus and method for pattern exposure and method for adjusting the apparatus

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4837141A (en) * 1971-09-01 1973-06-01
JPS51120725A (en) * 1975-04-16 1976-10-22 Sankyo Kogaku Kogyo Kk Automatic forcusing camera

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4837141A (en) * 1971-09-01 1973-06-01
JPS51120725A (en) * 1975-04-16 1976-10-22 Sankyo Kogaku Kogyo Kk Automatic forcusing camera

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63311220A (en) * 1987-06-12 1988-12-20 Nikon Corp Illuminator provided with ellipsoidal mirror
JPH01155621A (en) * 1987-12-11 1989-06-19 Canon Inc Lighting system
US6727980B2 (en) 1998-09-17 2004-04-27 Nikon Corporation Apparatus and method for pattern exposure and method for adjusting the apparatus

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