JPS5681680A - Etching method for niobium - Google Patents

Etching method for niobium

Info

Publication number
JPS5681680A
JPS5681680A JP15954979A JP15954979A JPS5681680A JP S5681680 A JPS5681680 A JP S5681680A JP 15954979 A JP15954979 A JP 15954979A JP 15954979 A JP15954979 A JP 15954979A JP S5681680 A JPS5681680 A JP S5681680A
Authority
JP
Japan
Prior art keywords
niobium
acid
soln
etching
contg
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15954979A
Other languages
Japanese (ja)
Inventor
Takeshi Murakami
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP15954979A priority Critical patent/JPS5681680A/en
Publication of JPS5681680A publication Critical patent/JPS5681680A/en
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00—Etching metallic material by chemical means
    • C23F1/10—Etching compositions
    • C23F1/14—Aqueous compositions
    • C23F1/16—Acidic compositions
    • C23F1/26—Acidic compositions for etching refractory metals

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • ing And Chemical Polishing (AREA)

Abstract

PURPOSE:To make distinct the metallic structure of niobium, by etching niobium in an aqueous soln. contg. a specific ratio of hydrofluoric acid, ammonium fluoride, hydrochloric acid, and nitric acid. CONSTITUTION:Aqeuous soln. contg. 5-15wt% hydroflouric acid, 2-6wt% ammonium fluoride, 10-20wt% hydrochloric acid, and 3-9wt% nitric acid is heated to >=50 deg.C temp. Etching is performed by immersing niobium into said mixed soln. for a prescribed time. Hereby distinct metallic structure of niobium is obtained. This method is effective also against sintered niobium alloy.
JP15954979A 1979-12-07 1979-12-07 Etching method for niobium Pending JPS5681680A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15954979A JPS5681680A (en) 1979-12-07 1979-12-07 Etching method for niobium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15954979A JPS5681680A (en) 1979-12-07 1979-12-07 Etching method for niobium

Publications (1)

Publication Number Publication Date
JPS5681680A true JPS5681680A (en) 1981-07-03

Family

ID=15696165

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15954979A Pending JPS5681680A (en) 1979-12-07 1979-12-07 Etching method for niobium

Country Status (1)

Country Link
JP (1) JPS5681680A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10259934B3 (en) * 2002-12-20 2004-10-14 H.C. Starck Gmbh Process for the production of molded parts from niobium or tantalum by electrochemical etching and molded parts obtainable in this way

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10259934B3 (en) * 2002-12-20 2004-10-14 H.C. Starck Gmbh Process for the production of molded parts from niobium or tantalum by electrochemical etching and molded parts obtainable in this way
US7090763B2 (en) 2002-12-20 2006-08-15 H. C. Starck Gmbh Process for the production of shaped articles of niobium or tantalum by electrochemical etching

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